TY - JOUR AU - Hoppe, Christian AU - Mitschker, Felix AU - Mai, Lukas AU - Liedke, Maciej Oskar AU - de los Arcos de Pedro, Maria Teresa AU - Awakowicz, Peter AU - Devi, Anjana AU - Attallah, Ahmed Gamal AU - Butterling, Maik AU - Wagner, Andreas AU - Grundmeier, Guido ID - 35977 IS - 4 JF - Plasma Processes and Polymers KW - Polymers and Plastics KW - Condensed Matter Physics SN - 1612-8850 TI - Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO x thin films on PDMS VL - 19 ER -