Influence of surface activation on the microporosity of PECVD and PEALD SiO            <sub>              <i>x</i>            </sub>            thin films on PDMS
C. Hoppe, F. Mitschker, L. Mai, M.O. Liedke, M.T. de los Arcos de Pedro, P. Awakowicz, A. Devi, A.G. Attallah, M. Butterling, A. Wagner, G. Grundmeier, Plasma Processes and Polymers 19 (2022).