{"_id":"3798","title":"Silicon oxynitride microdisk resonators for integrated waveguide coupling","department":[{"_id":"15"},{"_id":"230"},{"_id":"35"}],"publication_identifier":{"unknown":["978-3-95735-040-4"]},"user_id":"49428","citation":{"chicago":"Hett, Thomas, Torsten Frers, Alex Widhalm, Gerhard Berth, Ulrich Hilleringmann, and Artur Zrenner. “Silicon Oxynitride Microdisk Resonators for Integrated Waveguide Coupling.” In <i>Smart Systems Integration 2016 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2016</i>, 400–403. Munich, 2016.","short":"T. Hett, T. Frers, A. Widhalm, G. Berth, U. Hilleringmann, A. Zrenner, in: Smart Systems Integration 2016 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2016, Munich, 2016, pp. 400–403.","bibtex":"@inproceedings{Hett_Frers_Widhalm_Berth_Hilleringmann_Zrenner_2016, place={Munich}, title={Silicon oxynitride microdisk resonators for integrated waveguide coupling}, booktitle={Smart Systems Integration 2016 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2016}, author={Hett, Thomas and Frers, Torsten and Widhalm, Alex and Berth, Gerhard and Hilleringmann, Ulrich and Zrenner, Artur}, year={2016}, pages={400–403} }","apa":"Hett, T., Frers, T., Widhalm, A., Berth, G., Hilleringmann, U., &#38; Zrenner, A. (2016). Silicon oxynitride microdisk resonators for integrated waveguide coupling. In <i>Smart Systems Integration 2016 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2016</i> (pp. 400–403). Munich.","ieee":"T. Hett, T. Frers, A. Widhalm, G. Berth, U. Hilleringmann, and A. Zrenner, “Silicon oxynitride microdisk resonators for integrated waveguide coupling,” in <i>Smart Systems Integration 2016 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2016</i>, Munich, 2016, pp. 400–403.","mla":"Hett, Thomas, et al. “Silicon Oxynitride Microdisk Resonators for Integrated Waveguide Coupling.” <i>Smart Systems Integration 2016 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2016</i>, 2016, pp. 400–03.","ama":"Hett T, Frers T, Widhalm A, Berth G, Hilleringmann U, Zrenner A. Silicon oxynitride microdisk resonators for integrated waveguide coupling. In: <i>Smart Systems Integration 2016 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2016</i>. Munich; 2016:400-403."},"date_created":"2018-08-02T12:19:51Z","status":"public","year":"2016","place":"Munich","author":[{"last_name":"Hett","full_name":"Hett, Thomas","first_name":"Thomas"},{"full_name":"Frers, Torsten","last_name":"Frers","first_name":"Torsten"},{"last_name":"Widhalm","full_name":"Widhalm, Alex","first_name":"Alex"},{"id":"53","last_name":"Berth","full_name":"Berth, Gerhard","first_name":"Gerhard"},{"last_name":"Hilleringmann","full_name":"Hilleringmann, Ulrich","first_name":"Ulrich"},{"orcid":"0000-0002-5190-0944","first_name":"Artur","full_name":"Zrenner, Artur","last_name":"Zrenner","id":"606"}],"page":"400 - 403","type":"conference","date_updated":"2022-01-06T06:59:36Z","publication":"Smart Systems Integration 2016 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2016","conference":{"start_date":"2016-03-09","end_date":"2016-03-10","location":"Munich","name":"Smart Systems Integration 2016 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2016"},"language":[{"iso":"eng"}],"publication_status":"published"}