article A low-voltage torsional actuator for application in RF-microswitches R Plotz author S Michaelis author R Aigner author HJ Timme author J Binder author Reinhold Noé author 381https://orcid.org/0000-0002-5839-7616 56 department 2001 eng SENSORS AND ACTUATORS A-PHYSICAL 0924-424710.1016/S0924-4247(01)00589-1 921-3312-317 R. Plotz, S. Michaelis, R. Aigner, H. Timme, J. Binder, and R. Noé, “A low-voltage torsional actuator for application in RF-microswitches,” <i>SENSORS AND ACTUATORS A-PHYSICAL</i>, vol. 92, no. 1–3, pp. 312–317, 2001, doi: <a href="https://doi.org/10.1016/S0924-4247(01)00589-1">10.1016/S0924-4247(01)00589-1</a>. Plotz, R, S Michaelis, R Aigner, HJ Timme, J Binder, and Reinhold Noé. “A Low-Voltage Torsional Actuator for Application in RF-Microswitches.” <i>SENSORS AND ACTUATORS A-PHYSICAL</i> 92, no. 1–3 (2001): 312–17. <a href="https://doi.org/10.1016/S0924-4247(01)00589-1">https://doi.org/10.1016/S0924-4247(01)00589-1</a>. Plotz R, Michaelis S, Aigner R, Timme H, Binder J, Noé R. A low-voltage torsional actuator for application in RF-microswitches. <i>SENSORS AND ACTUATORS A-PHYSICAL</i>. 2001;92(1-3):312-317. doi:<a href="https://doi.org/10.1016/S0924-4247(01)00589-1">10.1016/S0924-4247(01)00589-1</a> Plotz, R., Michaelis, S., Aigner, R., Timme, H., Binder, J., &#38; Noé, R. (2001). A low-voltage torsional actuator for application in RF-microswitches. <i>SENSORS AND ACTUATORS A-PHYSICAL</i>, <i>92</i>(1–3), 312–317. <a href="https://doi.org/10.1016/S0924-4247(01)00589-1">https://doi.org/10.1016/S0924-4247(01)00589-1</a> R. Plotz, S. Michaelis, R. Aigner, H. Timme, J. Binder, R. Noé, SENSORS AND ACTUATORS A-PHYSICAL 92 (2001) 312–317. @article{Plotz_Michaelis_Aigner_Timme_Binder_Noé_2001, title={A low-voltage torsional actuator for application in RF-microswitches}, volume={92}, DOI={<a href="https://doi.org/10.1016/S0924-4247(01)00589-1">10.1016/S0924-4247(01)00589-1</a>}, number={1–3}, journal={SENSORS AND ACTUATORS A-PHYSICAL}, author={Plotz, R and Michaelis, S and Aigner, R and Timme, HJ and Binder, J and Noé, Reinhold}, year={2001}, pages={312–317} } Plotz, R., et al. “A Low-Voltage Torsional Actuator for Application in RF-Microswitches.” <i>SENSORS AND ACTUATORS A-PHYSICAL</i>, vol. 92, no. 1–3, 2001, pp. 312–17, doi:<a href="https://doi.org/10.1016/S0924-4247(01)00589-1">10.1016/S0924-4247(01)00589-1</a>. 382912023-01-23T18:11:12Z2023-01-25T22:54:03Z