---
_id: '3921'
abstract:
- lang: eng
  text: "Bottom-up patterning techniques allow for the creation of surfaces with ordered
    arrays of nanoscale features\r\non large areas. Two bottom-up techniques suitable
    for the formation of regular nanopatterns on\r\ndifferent length scales are nanosphere
    lithography (NSL) and block copolymer (BCP) lithography. In this\r\npaper it is
    shown that NSL and BCP lithography can be combined to easily design hierarchically
    nanopatterned\r\nsurfaces of different materials. Nanosphere lithography is used
    for the pre-patterning of\r\nsurfaces with antidots, i.e. hexagonally arranged
    cylindrical holes in thin films of Au, Pt and TiO2 on SiO2,\r\nproviding a periodic
    chemical and topographical contrast on the surface suitable for templating in
    subsequent\r\nBCP lithography. PS-b-PMMA BCP is used in the second self-assembly
    step to form hexagonally\r\narranged nanopores with sub-20 nm diameter within
    the antidots upon microphase separation. To\r\nachieve this the microphase separation
    of BCP on planar surfaces is studied, too, and it is demonstrated\r\nfor the first
    time that vertical BCP nanopores can be formed on TiO2, Au and Pt films without
    using any\r\nneutralization layers. To explain this the influence of surface energy,
    polarity and roughness on the microphase\r\nseparation is investigated and discussed
    along with the wetting state of BCP on NSL-pre-patterned\r\nsurfaces. The presented
    novel route for the creation of advanced hierarchical nanopatterns is easily applicable\r\non
    large-area surfaces of different materials. This flexibility makes it suitable
    for a broad range of\r\napplications, from the morphological design of biocompatible
    surfaces for life science to complex\r\npre-patterns for nanoparticle placement
    in semiconductor technology."
article_type: original
author:
- first_name: Katharina
  full_name: Brassat, Katharina
  id: '11305'
  last_name: Brassat
- first_name: Daniel
  full_name: Kool, Daniel
  id: '44586'
  last_name: Kool
- first_name: Julius
  full_name: Bürger, Julius
  id: '46952'
  last_name: Bürger
- first_name: Jörg
  full_name: Lindner, Jörg
  id: '20797'
  last_name: Lindner
citation:
  ama: Brassat K, Kool D, Bürger J, Lindner J. Hierarchical nanopores formed by block
    copolymer lithography on the surfaces of different materials pre-patterned by
    nanosphere lithography. <i>Nanoscale</i>. 2018;10(21):10005-10017. doi:<a href="https://doi.org/10.1039/c8nr01397g">10.1039/c8nr01397g</a>
  apa: Brassat, K., Kool, D., Bürger, J., &#38; Lindner, J. (2018). Hierarchical nanopores
    formed by block copolymer lithography on the surfaces of different materials pre-patterned
    by nanosphere lithography. <i>Nanoscale</i>, <i>10</i>(21), 10005–10017. <a href="https://doi.org/10.1039/c8nr01397g">https://doi.org/10.1039/c8nr01397g</a>
  bibtex: '@article{Brassat_Kool_Bürger_Lindner_2018, title={Hierarchical nanopores
    formed by block copolymer lithography on the surfaces of different materials pre-patterned
    by nanosphere lithography}, volume={10}, DOI={<a href="https://doi.org/10.1039/c8nr01397g">10.1039/c8nr01397g</a>},
    number={21}, journal={Nanoscale}, publisher={Royal Society of Chemistry (RSC)},
    author={Brassat, Katharina and Kool, Daniel and Bürger, Julius and Lindner, Jörg},
    year={2018}, pages={10005–10017} }'
  chicago: 'Brassat, Katharina, Daniel Kool, Julius Bürger, and Jörg Lindner. “Hierarchical
    Nanopores Formed by Block Copolymer Lithography on the Surfaces of Different Materials
    Pre-Patterned by Nanosphere Lithography.” <i>Nanoscale</i> 10, no. 21 (2018):
    10005–17. <a href="https://doi.org/10.1039/c8nr01397g">https://doi.org/10.1039/c8nr01397g</a>.'
  ieee: K. Brassat, D. Kool, J. Bürger, and J. Lindner, “Hierarchical nanopores formed
    by block copolymer lithography on the surfaces of different materials pre-patterned
    by nanosphere lithography,” <i>Nanoscale</i>, vol. 10, no. 21, pp. 10005–10017,
    2018.
  mla: Brassat, Katharina, et al. “Hierarchical Nanopores Formed by Block Copolymer
    Lithography on the Surfaces of Different Materials Pre-Patterned by Nanosphere
    Lithography.” <i>Nanoscale</i>, vol. 10, no. 21, Royal Society of Chemistry (RSC),
    2018, pp. 10005–17, doi:<a href="https://doi.org/10.1039/c8nr01397g">10.1039/c8nr01397g</a>.
  short: K. Brassat, D. Kool, J. Bürger, J. Lindner, Nanoscale 10 (2018) 10005–10017.
date_created: 2018-08-16T12:59:02Z
date_updated: 2022-01-06T06:59:55Z
ddc:
- '530'
department:
- _id: '286'
- _id: '15'
doi: 10.1039/c8nr01397g
file:
- access_level: closed
  content_type: application/pdf
  creator: hclaudia
  date_created: 2018-08-16T12:59:56Z
  date_updated: 2018-08-16T12:59:56Z
  file_id: '3922'
  file_name: Hierarchical_nanopores_by_block_copolymer_lithography_on_surfaces_of_different_materials_pre-patterned_by_nanosphere_lithography_2018.pdf
  file_size: 3875099
  relation: main_file
  success: 1
file_date_updated: 2018-08-16T12:59:56Z
has_accepted_license: '1'
intvolume: '        10'
issue: '21'
language:
- iso: eng
page: 10005-10017
publication: Nanoscale
publication_identifier:
  issn:
  - 2040-3364
  - 2040-3372
publication_status: published
publisher: Royal Society of Chemistry (RSC)
status: public
title: Hierarchical nanopores formed by block copolymer lithography on the surfaces
  of different materials pre-patterned by nanosphere lithography
type: journal_article
user_id: '55706'
volume: 10
year: '2018'
...