{"department":[{"_id":"59"}],"doi":"10.1007/978-3-658-23444-7_3","publication_status":"published","type":"book_chapter","user_id":"20179","title":"Oxidation des Siliziums","date_updated":"2023-03-22T10:29:51Z","status":"public","author":[{"id":"20179","first_name":"Ulrich","last_name":"Hilleringmann","full_name":"Hilleringmann, Ulrich"}],"publisher":"Springer Fachmedien Wiesbaden","publication":"Silizium-Halbleitertechnologie","date_created":"2023-01-24T10:43:06Z","publication_identifier":{"isbn":["9783658234430","9783658234447"]},"language":[{"iso":"eng"}],"citation":{"chicago":"Hilleringmann, Ulrich. “Oxidation Des Siliziums.” In <i>Silizium-Halbleitertechnologie</i>. Wiesbaden: Springer Fachmedien Wiesbaden, 2018. <a href=\"https://doi.org/10.1007/978-3-658-23444-7_3\">https://doi.org/10.1007/978-3-658-23444-7_3</a>.","mla":"Hilleringmann, Ulrich. “Oxidation Des Siliziums.” <i>Silizium-Halbleitertechnologie</i>, Springer Fachmedien Wiesbaden, 2018, doi:<a href=\"https://doi.org/10.1007/978-3-658-23444-7_3\">10.1007/978-3-658-23444-7_3</a>.","ieee":"U. Hilleringmann, “Oxidation des Siliziums,” in <i>Silizium-Halbleitertechnologie</i>, Wiesbaden: Springer Fachmedien Wiesbaden, 2018.","short":"U. Hilleringmann, in: Silizium-Halbleitertechnologie, Springer Fachmedien Wiesbaden, Wiesbaden, 2018.","ama":"Hilleringmann U. Oxidation des Siliziums. In: <i>Silizium-Halbleitertechnologie</i>. Springer Fachmedien Wiesbaden; 2018. doi:<a href=\"https://doi.org/10.1007/978-3-658-23444-7_3\">10.1007/978-3-658-23444-7_3</a>","apa":"Hilleringmann, U. (2018). Oxidation des Siliziums. In <i>Silizium-Halbleitertechnologie</i>. Springer Fachmedien Wiesbaden. <a href=\"https://doi.org/10.1007/978-3-658-23444-7_3\">https://doi.org/10.1007/978-3-658-23444-7_3</a>","bibtex":"@inbook{Hilleringmann_2018, place={Wiesbaden}, title={Oxidation des Siliziums}, DOI={<a href=\"https://doi.org/10.1007/978-3-658-23444-7_3\">10.1007/978-3-658-23444-7_3</a>}, booktitle={Silizium-Halbleitertechnologie}, publisher={Springer Fachmedien Wiesbaden}, author={Hilleringmann, Ulrich}, year={2018} }"},"year":"2018","place":"Wiesbaden","_id":"39429"}