---
res:
  bibo_authorlist:
  - foaf_Person:
      foaf_givenName: Ulrich
      foaf_name: Hilleringmann, Ulrich
      foaf_surname: Hilleringmann
      foaf_workInfoHomepage: http://www.librecat.org/personId=20179
  - foaf_Person:
      foaf_givenName: F.
      foaf_name: Assion, F.
      foaf_surname: Assion
  - foaf_Person:
      foaf_givenName: F. F.
      foaf_name: Vidor, F. F.
      foaf_surname: Vidor
  - foaf_Person:
      foaf_givenName: G. I.
      foaf_name: Wirth, G. I.
      foaf_surname: Wirth
  bibo_doi: 10.13052/jmmc2246-137x.131
  bibo_issue: '3'
  bibo_volume: 1
  dct_date: 2015^xs_gYear
  dct_isPartOf:
  - http://id.crossref.org/issn/2246-137X
  dct_language: eng
  dct_publisher: River Publishers@
  dct_subject:
  - General Medicine
  dct_title: Nanometer Scale Electronic Device Integration Using Side-Wall Deposition
    and Etch-Back Technology@
...