[{"date_created":"2023-01-24T11:54:26Z","department":[{"_id":"59"}],"keyword":["Electrical and Electronic Engineering","Mechanical Engineering","Mechanics of Materials","Electronic","Optical and Magnetic Materials"],"type":"journal_article","publication":"Journal of Micromechanics and Microengineering","issue":"12","language":[{"iso":"eng"}],"article_number":"125012","doi":"10.1088/0960-1317/22/12/125012","author":[{"full_name":"Brockmeier, A","first_name":"A","last_name":"Brockmeier"},{"last_name":"Rodriguez","first_name":"F J Santos","full_name":"Rodriguez, F J Santos"},{"last_name":"Harrison","first_name":"M","full_name":"Harrison, M"},{"full_name":"Hilleringmann, Ulrich","first_name":"Ulrich","last_name":"Hilleringmann","id":"20179"}],"publication_identifier":{"issn":["0960-1317","1361-6439"]},"year":"2012","title":"Surface tension and its role for vertical wet etching of silicon","intvolume":"        22","date_updated":"2023-03-21T10:19:17Z","publication_status":"published","citation":{"bibtex":"@article{Brockmeier_Rodriguez_Harrison_Hilleringmann_2012, title={Surface tension and its role for vertical wet etching of silicon}, volume={22}, DOI={<a href=\"https://doi.org/10.1088/0960-1317/22/12/125012\">10.1088/0960-1317/22/12/125012</a>}, number={12125012}, journal={Journal of Micromechanics and Microengineering}, publisher={IOP Publishing}, author={Brockmeier, A and Rodriguez, F J Santos and Harrison, M and Hilleringmann, Ulrich}, year={2012} }","ama":"Brockmeier A, Rodriguez FJS, Harrison M, Hilleringmann U. Surface tension and its role for vertical wet etching of silicon. <i>Journal of Micromechanics and Microengineering</i>. 2012;22(12). doi:<a href=\"https://doi.org/10.1088/0960-1317/22/12/125012\">10.1088/0960-1317/22/12/125012</a>","mla":"Brockmeier, A., et al. “Surface Tension and Its Role for Vertical Wet Etching of Silicon.” <i>Journal of Micromechanics and Microengineering</i>, vol. 22, no. 12, 125012, IOP Publishing, 2012, doi:<a href=\"https://doi.org/10.1088/0960-1317/22/12/125012\">10.1088/0960-1317/22/12/125012</a>.","short":"A. Brockmeier, F.J.S. Rodriguez, M. Harrison, U. Hilleringmann, Journal of Micromechanics and Microengineering 22 (2012).","chicago":"Brockmeier, A, F J Santos Rodriguez, M Harrison, and Ulrich Hilleringmann. “Surface Tension and Its Role for Vertical Wet Etching of Silicon.” <i>Journal of Micromechanics and Microengineering</i> 22, no. 12 (2012). <a href=\"https://doi.org/10.1088/0960-1317/22/12/125012\">https://doi.org/10.1088/0960-1317/22/12/125012</a>.","ieee":"A. Brockmeier, F. J. S. Rodriguez, M. Harrison, and U. Hilleringmann, “Surface tension and its role for vertical wet etching of silicon,” <i>Journal of Micromechanics and Microengineering</i>, vol. 22, no. 12, Art. no. 125012, 2012, doi: <a href=\"https://doi.org/10.1088/0960-1317/22/12/125012\">10.1088/0960-1317/22/12/125012</a>.","apa":"Brockmeier, A., Rodriguez, F. J. S., Harrison, M., &#38; Hilleringmann, U. (2012). Surface tension and its role for vertical wet etching of silicon. <i>Journal of Micromechanics and Microengineering</i>, <i>22</i>(12), Article 125012. <a href=\"https://doi.org/10.1088/0960-1317/22/12/125012\">https://doi.org/10.1088/0960-1317/22/12/125012</a>"},"publisher":"IOP Publishing","_id":"39520","volume":22,"user_id":"20179","status":"public"}]