article published A Brockmeier author F J Santos Rodriguez author M Harrison author Ulrich Hilleringmann author 20179 59 department IOP Publishing2012 eng Electrical and Electronic EngineeringMechanical EngineeringMechanics of MaterialsElectronicOptical and Magnetic Materials 0960-1317 1361-643910.1088/0960-1317/22/12/125012 2212 A. Brockmeier, F.J.S. Rodriguez, M. Harrison, U. Hilleringmann, Journal of Micromechanics and Microengineering 22 (2012). Brockmeier, A, F J Santos Rodriguez, M Harrison, and Ulrich Hilleringmann. “Surface Tension and Its Role for Vertical Wet Etching of Silicon.” <i>Journal of Micromechanics and Microengineering</i> 22, no. 12 (2012). <a href="https://doi.org/10.1088/0960-1317/22/12/125012">https://doi.org/10.1088/0960-1317/22/12/125012</a>. A. Brockmeier, F. J. S. Rodriguez, M. Harrison, and U. Hilleringmann, “Surface tension and its role for vertical wet etching of silicon,” <i>Journal of Micromechanics and Microengineering</i>, vol. 22, no. 12, Art. no. 125012, 2012, doi: <a href="https://doi.org/10.1088/0960-1317/22/12/125012">10.1088/0960-1317/22/12/125012</a>. Brockmeier, A., Rodriguez, F. J. S., Harrison, M., &#38; Hilleringmann, U. (2012). Surface tension and its role for vertical wet etching of silicon. <i>Journal of Micromechanics and Microengineering</i>, <i>22</i>(12), Article 125012. <a href="https://doi.org/10.1088/0960-1317/22/12/125012">https://doi.org/10.1088/0960-1317/22/12/125012</a> @article{Brockmeier_Rodriguez_Harrison_Hilleringmann_2012, title={Surface tension and its role for vertical wet etching of silicon}, volume={22}, DOI={<a href="https://doi.org/10.1088/0960-1317/22/12/125012">10.1088/0960-1317/22/12/125012</a>}, number={12125012}, journal={Journal of Micromechanics and Microengineering}, publisher={IOP Publishing}, author={Brockmeier, A and Rodriguez, F J Santos and Harrison, M and Hilleringmann, Ulrich}, year={2012} } Brockmeier A, Rodriguez FJS, Harrison M, Hilleringmann U. Surface tension and its role for vertical wet etching of silicon. <i>Journal of Micromechanics and Microengineering</i>. 2012;22(12). doi:<a href="https://doi.org/10.1088/0960-1317/22/12/125012">10.1088/0960-1317/22/12/125012</a> Brockmeier, A., et al. “Surface Tension and Its Role for Vertical Wet Etching of Silicon.” <i>Journal of Micromechanics and Microengineering</i>, vol. 22, no. 12, 125012, IOP Publishing, 2012, doi:<a href="https://doi.org/10.1088/0960-1317/22/12/125012">10.1088/0960-1317/22/12/125012</a>. 395202023-01-24T11:54:26Z2023-03-21T10:19:17Z