@inproceedings{39536,
  author       = {{Frers, Torsten and Hett, Thomas and Hilleringmann, Ulrich and Berth, Gerhard and Widhalm, Alex and Zrenner, Artur}},
  booktitle    = {{2011 Semiconductor Conference Dresden}},
  publisher    = {{IEEE}},
  title        = {{{Characterization of SiON integrated waveguides via FTIR and AFM measurements}}},
  doi          = {{10.1109/scd.2011.6068744}},
  year         = {{2011}},
}