{"doi":"10.1109/scd.2011.6068744","department":[{"_id":"59"}],"publication_status":"published","date_updated":"2023-03-21T10:21:37Z","title":"Characterization of SiON integrated waveguides via FTIR and AFM measurements","user_id":"20179","type":"conference","status":"public","author":[{"full_name":"Frers, Torsten","last_name":"Frers","first_name":"Torsten"},{"last_name":"Hett","first_name":"Thomas","full_name":"Hett, Thomas"},{"last_name":"Hilleringmann","first_name":"Ulrich","id":"20179","full_name":"Hilleringmann, Ulrich"},{"full_name":"Berth, Gerhard","last_name":"Berth","first_name":"Gerhard"},{"last_name":"Widhalm","first_name":"Alex","full_name":"Widhalm, Alex"},{"first_name":"Artur","last_name":"Zrenner","full_name":"Zrenner, Artur"}],"date_created":"2023-01-24T12:03:46Z","publisher":"IEEE","publication":"2011 Semiconductor Conference Dresden","_id":"39536","year":"2011","citation":{"ama":"Frers T, Hett T, Hilleringmann U, Berth G, Widhalm A, Zrenner A. Characterization of SiON integrated waveguides via FTIR and AFM measurements. In: <i>2011 Semiconductor Conference Dresden</i>. IEEE; 2011. doi:<a href=\"https://doi.org/10.1109/scd.2011.6068744\">10.1109/scd.2011.6068744</a>","apa":"Frers, T., Hett, T., Hilleringmann, U., Berth, G., Widhalm, A., &#38; Zrenner, A. (2011). Characterization of SiON integrated waveguides via FTIR and AFM measurements. <i>2011 Semiconductor Conference Dresden</i>. <a href=\"https://doi.org/10.1109/scd.2011.6068744\">https://doi.org/10.1109/scd.2011.6068744</a>","chicago":"Frers, Torsten, Thomas Hett, Ulrich Hilleringmann, Gerhard Berth, Alex Widhalm, and Artur Zrenner. “Characterization of SiON Integrated Waveguides via FTIR and AFM Measurements.” In <i>2011 Semiconductor Conference Dresden</i>. IEEE, 2011. <a href=\"https://doi.org/10.1109/scd.2011.6068744\">https://doi.org/10.1109/scd.2011.6068744</a>.","mla":"Frers, Torsten, et al. “Characterization of SiON Integrated Waveguides via FTIR and AFM Measurements.” <i>2011 Semiconductor Conference Dresden</i>, IEEE, 2011, doi:<a href=\"https://doi.org/10.1109/scd.2011.6068744\">10.1109/scd.2011.6068744</a>.","ieee":"T. Frers, T. Hett, U. Hilleringmann, G. Berth, A. Widhalm, and A. Zrenner, “Characterization of SiON integrated waveguides via FTIR and AFM measurements,” 2011, doi: <a href=\"https://doi.org/10.1109/scd.2011.6068744\">10.1109/scd.2011.6068744</a>.","short":"T. Frers, T. Hett, U. Hilleringmann, G. Berth, A. Widhalm, A. Zrenner, in: 2011 Semiconductor Conference Dresden, IEEE, 2011.","bibtex":"@inproceedings{Frers_Hett_Hilleringmann_Berth_Widhalm_Zrenner_2011, title={Characterization of SiON integrated waveguides via FTIR and AFM measurements}, DOI={<a href=\"https://doi.org/10.1109/scd.2011.6068744\">10.1109/scd.2011.6068744</a>}, booktitle={2011 Semiconductor Conference Dresden}, publisher={IEEE}, author={Frers, Torsten and Hett, Thomas and Hilleringmann, Ulrich and Berth, Gerhard and Widhalm, Alex and Zrenner, Artur}, year={2011} }"},"language":[{"iso":"eng"}]}