conference paper published Torsten Frers author Thomas Hett author Ulrich Hilleringmann author 20179 Gerhard Berth author Alex Widhalm author Artur Zrenner author 59 department IEEE2011 eng 10.1109/scd.2011.6068744 Frers, Torsten, Thomas Hett, Ulrich Hilleringmann, Gerhard Berth, Alex Widhalm, and Artur Zrenner. “Characterization of SiON Integrated Waveguides via FTIR and AFM Measurements.” In <i>2011 Semiconductor Conference Dresden</i>. IEEE, 2011. <a href="https://doi.org/10.1109/scd.2011.6068744">https://doi.org/10.1109/scd.2011.6068744</a>. T. Frers, T. Hett, U. Hilleringmann, G. Berth, A. Widhalm, and A. Zrenner, “Characterization of SiON integrated waveguides via FTIR and AFM measurements,” 2011, doi: <a href="https://doi.org/10.1109/scd.2011.6068744">10.1109/scd.2011.6068744</a>. Frers T, Hett T, Hilleringmann U, Berth G, Widhalm A, Zrenner A. Characterization of SiON integrated waveguides via FTIR and AFM measurements. In: <i>2011 Semiconductor Conference Dresden</i>. IEEE; 2011. doi:<a href="https://doi.org/10.1109/scd.2011.6068744">10.1109/scd.2011.6068744</a> T. Frers, T. Hett, U. Hilleringmann, G. Berth, A. Widhalm, A. Zrenner, in: 2011 Semiconductor Conference Dresden, IEEE, 2011. @inproceedings{Frers_Hett_Hilleringmann_Berth_Widhalm_Zrenner_2011, title={Characterization of SiON integrated waveguides via FTIR and AFM measurements}, DOI={<a href="https://doi.org/10.1109/scd.2011.6068744">10.1109/scd.2011.6068744</a>}, booktitle={2011 Semiconductor Conference Dresden}, publisher={IEEE}, author={Frers, Torsten and Hett, Thomas and Hilleringmann, Ulrich and Berth, Gerhard and Widhalm, Alex and Zrenner, Artur}, year={2011} } Frers, Torsten, et al. “Characterization of SiON Integrated Waveguides via FTIR and AFM Measurements.” <i>2011 Semiconductor Conference Dresden</i>, IEEE, 2011, doi:<a href="https://doi.org/10.1109/scd.2011.6068744">10.1109/scd.2011.6068744</a>. Frers, T., Hett, T., Hilleringmann, U., Berth, G., Widhalm, A., &#38; Zrenner, A. (2011). Characterization of SiON integrated waveguides via FTIR and AFM measurements. <i>2011 Semiconductor Conference Dresden</i>. <a href="https://doi.org/10.1109/scd.2011.6068744">https://doi.org/10.1109/scd.2011.6068744</a> 395362023-01-24T12:03:46Z2023-03-21T10:21:37Z