---
_id: '39536'
author:
- first_name: Torsten
  full_name: Frers, Torsten
  last_name: Frers
- first_name: Thomas
  full_name: Hett, Thomas
  last_name: Hett
- first_name: Ulrich
  full_name: Hilleringmann, Ulrich
  id: '20179'
  last_name: Hilleringmann
- first_name: Gerhard
  full_name: Berth, Gerhard
  last_name: Berth
- first_name: Alex
  full_name: Widhalm, Alex
  last_name: Widhalm
- first_name: Artur
  full_name: Zrenner, Artur
  last_name: Zrenner
citation:
  ama: 'Frers T, Hett T, Hilleringmann U, Berth G, Widhalm A, Zrenner A. Characterization
    of SiON integrated waveguides via FTIR and AFM measurements. In: <i>2011 Semiconductor
    Conference Dresden</i>. IEEE; 2011. doi:<a href="https://doi.org/10.1109/scd.2011.6068744">10.1109/scd.2011.6068744</a>'
  apa: Frers, T., Hett, T., Hilleringmann, U., Berth, G., Widhalm, A., &#38; Zrenner,
    A. (2011). Characterization of SiON integrated waveguides via FTIR and AFM measurements.
    <i>2011 Semiconductor Conference Dresden</i>. <a href="https://doi.org/10.1109/scd.2011.6068744">https://doi.org/10.1109/scd.2011.6068744</a>
  bibtex: '@inproceedings{Frers_Hett_Hilleringmann_Berth_Widhalm_Zrenner_2011, title={Characterization
    of SiON integrated waveguides via FTIR and AFM measurements}, DOI={<a href="https://doi.org/10.1109/scd.2011.6068744">10.1109/scd.2011.6068744</a>},
    booktitle={2011 Semiconductor Conference Dresden}, publisher={IEEE}, author={Frers,
    Torsten and Hett, Thomas and Hilleringmann, Ulrich and Berth, Gerhard and Widhalm,
    Alex and Zrenner, Artur}, year={2011} }'
  chicago: Frers, Torsten, Thomas Hett, Ulrich Hilleringmann, Gerhard Berth, Alex
    Widhalm, and Artur Zrenner. “Characterization of SiON Integrated Waveguides via
    FTIR and AFM Measurements.” In <i>2011 Semiconductor Conference Dresden</i>. IEEE,
    2011. <a href="https://doi.org/10.1109/scd.2011.6068744">https://doi.org/10.1109/scd.2011.6068744</a>.
  ieee: 'T. Frers, T. Hett, U. Hilleringmann, G. Berth, A. Widhalm, and A. Zrenner,
    “Characterization of SiON integrated waveguides via FTIR and AFM measurements,”
    2011, doi: <a href="https://doi.org/10.1109/scd.2011.6068744">10.1109/scd.2011.6068744</a>.'
  mla: Frers, Torsten, et al. “Characterization of SiON Integrated Waveguides via
    FTIR and AFM Measurements.” <i>2011 Semiconductor Conference Dresden</i>, IEEE,
    2011, doi:<a href="https://doi.org/10.1109/scd.2011.6068744">10.1109/scd.2011.6068744</a>.
  short: 'T. Frers, T. Hett, U. Hilleringmann, G. Berth, A. Widhalm, A. Zrenner, in:
    2011 Semiconductor Conference Dresden, IEEE, 2011.'
date_created: 2023-01-24T12:03:46Z
date_updated: 2023-03-21T10:21:37Z
department:
- _id: '59'
doi: 10.1109/scd.2011.6068744
language:
- iso: eng
publication: 2011 Semiconductor Conference Dresden
publication_status: published
publisher: IEEE
status: public
title: Characterization of SiON integrated waveguides via FTIR and AFM measurements
type: conference
user_id: '20179'
year: '2011'
...