{"_id":"3954","series_title":"Poster P.9.1","user_id":"55706","department":[{"_id":"286"},{"_id":"15"}],"status":"public","type":"conference","title":"Morphological properties of nanopillar patterned Si surfaces obtained by nanosphere lithography and metal-assisted wet-chemical etching","conference":{"name":"E-MRS Spring Meeting 2017","start_date":"2017-05-22","end_date":"2017-05-26","location":"Straßburg (France)"},"date_updated":"2022-01-06T06:59:59Z","date_created":"2018-08-20T13:28:53Z","author":[{"last_name":"Kismann","full_name":"Kismann, Michael","first_name":"Michael"},{"id":"36950","full_name":"Riedl, Thomas","last_name":"Riedl","first_name":"Thomas"},{"last_name":"Lindner","full_name":"Lindner, Jörg","id":"20797","first_name":"Jörg"}],"year":"2017","citation":{"chicago":"Kismann, Michael, Thomas Riedl, and Jörg Lindner. “Morphological Properties of Nanopillar Patterned Si Surfaces Obtained by Nanosphere Lithography and Metal-Assisted Wet-Chemical Etching.” Poster P.9.1, 2017.","ieee":"M. Kismann, T. Riedl, and J. Lindner, “Morphological properties of nanopillar patterned Si surfaces obtained by nanosphere lithography and metal-assisted wet-chemical etching.” 2017.","ama":"Kismann M, Riedl T, Lindner J. Morphological properties of nanopillar patterned Si surfaces obtained by nanosphere lithography and metal-assisted wet-chemical etching. 2017.","apa":"Kismann, M., Riedl, T., &#38; Lindner, J. (2017). Morphological properties of nanopillar patterned Si surfaces obtained by nanosphere lithography and metal-assisted wet-chemical etching. Presented at the E-MRS Spring Meeting 2017, Straßburg (France).","mla":"Kismann, Michael, et al. <i>Morphological Properties of Nanopillar Patterned Si Surfaces Obtained by Nanosphere Lithography and Metal-Assisted Wet-Chemical Etching</i>. 2017.","bibtex":"@article{Kismann_Riedl_Lindner_2017, series={Poster P.9.1}, title={Morphological properties of nanopillar patterned Si surfaces obtained by nanosphere lithography and metal-assisted wet-chemical etching}, author={Kismann, Michael and Riedl, Thomas and Lindner, Jörg}, year={2017}, collection={Poster P.9.1} }","short":"M. Kismann, T. Riedl, J. Lindner, (2017)."}}