{"date_updated":"2022-01-06T06:59:59Z","year":"2017","title":"Morphological properties of nanopillar patterned Si surfaces obtained by nanosphere lithography and metal-assisted wet-chemical etching","status":"public","author":[{"full_name":"Kismann, Michael","last_name":"Kismann","first_name":"Michael"},{"last_name":"Riedl","first_name":"Thomas","full_name":"Riedl, Thomas","id":"36950"},{"id":"20797","full_name":"Lindner, Jörg","last_name":"Lindner","first_name":"Jörg"}],"conference":{"location":"Straßburg (France)","start_date":"2017-05-22","name":"E-MRS Spring Meeting 2017","end_date":"2017-05-26"},"user_id":"55706","series_title":"Poster P.9.1","_id":"3954","citation":{"ieee":"M. Kismann, T. Riedl, and J. Lindner, “Morphological properties of nanopillar patterned Si surfaces obtained by nanosphere lithography and metal-assisted wet-chemical etching.” 2017.","apa":"Kismann, M., Riedl, T., &#38; Lindner, J. (2017). Morphological properties of nanopillar patterned Si surfaces obtained by nanosphere lithography and metal-assisted wet-chemical etching. Presented at the E-MRS Spring Meeting 2017, Straßburg (France).","short":"M. Kismann, T. Riedl, J. Lindner, (2017).","chicago":"Kismann, Michael, Thomas Riedl, and Jörg Lindner. “Morphological Properties of Nanopillar Patterned Si Surfaces Obtained by Nanosphere Lithography and Metal-Assisted Wet-Chemical Etching.” Poster P.9.1, 2017.","mla":"Kismann, Michael, et al. <i>Morphological Properties of Nanopillar Patterned Si Surfaces Obtained by Nanosphere Lithography and Metal-Assisted Wet-Chemical Etching</i>. 2017.","bibtex":"@article{Kismann_Riedl_Lindner_2017, series={Poster P.9.1}, title={Morphological properties of nanopillar patterned Si surfaces obtained by nanosphere lithography and metal-assisted wet-chemical etching}, author={Kismann, Michael and Riedl, Thomas and Lindner, Jörg}, year={2017}, collection={Poster P.9.1} }","ama":"Kismann M, Riedl T, Lindner J. Morphological properties of nanopillar patterned Si surfaces obtained by nanosphere lithography and metal-assisted wet-chemical etching. 2017."},"type":"conference","department":[{"_id":"286"},{"_id":"15"}],"date_created":"2018-08-20T13:28:53Z"}