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<titleInfo><title>Morphological properties of nanopillar patterned Si surfaces obtained by nanosphere lithography and metal-assisted wet-chemical etching</title></titleInfo>





<name type="personal">
  <namePart type="given">Michael</namePart>
  <namePart type="family">Kismann</namePart>
  <role><roleTerm type="text">author</roleTerm> </role></name>
<name type="personal">
  <namePart type="given">Thomas</namePart>
  <namePart type="family">Riedl</namePart>
  <role><roleTerm type="text">author</roleTerm> </role><identifier type="local">36950</identifier></name>
<name type="personal">
  <namePart type="given">Jörg</namePart>
  <namePart type="family">Lindner</namePart>
  <role><roleTerm type="text">author</roleTerm> </role><identifier type="local">20797</identifier></name>







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  <namePart>E-MRS Spring Meeting 2017</namePart>
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<originInfo><dateIssued encoding="w3cdtf">2017</dateIssued><place><placeTerm type="text">Straßburg (France)</placeTerm></place>
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<apa>Kismann, M., Riedl, T., &amp;#38; Lindner, J. (2017). Morphological properties of nanopillar patterned Si surfaces obtained by nanosphere lithography and metal-assisted wet-chemical etching. Presented at the E-MRS Spring Meeting 2017, Straßburg (France).</apa>
<ieee>M. Kismann, T. Riedl, and J. Lindner, “Morphological properties of nanopillar patterned Si surfaces obtained by nanosphere lithography and metal-assisted wet-chemical etching.” 2017.</ieee>
<chicago>Kismann, Michael, Thomas Riedl, and Jörg Lindner. “Morphological Properties of Nanopillar Patterned Si Surfaces Obtained by Nanosphere Lithography and Metal-Assisted Wet-Chemical Etching.” Poster P.9.1, 2017.</chicago>
<short>M. Kismann, T. Riedl, J. Lindner, (2017).</short>
<mla>Kismann, Michael, et al. &lt;i&gt;Morphological Properties of Nanopillar Patterned Si Surfaces Obtained by Nanosphere Lithography and Metal-Assisted Wet-Chemical Etching&lt;/i&gt;. 2017.</mla>
<ama>Kismann M, Riedl T, Lindner J. Morphological properties of nanopillar patterned Si surfaces obtained by nanosphere lithography and metal-assisted wet-chemical etching. 2017.</ama>
<bibtex>@article{Kismann_Riedl_Lindner_2017, series={Poster P.9.1}, title={Morphological properties of nanopillar patterned Si surfaces obtained by nanosphere lithography and metal-assisted wet-chemical etching}, author={Kismann, Michael and Riedl, Thomas and Lindner, Jörg}, year={2017}, collection={Poster P.9.1} }</bibtex>
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