@article{3959,
  abstract     = {{Microresonators containing quantum dots find application in devices like single photon emitters for quantum information technology as well as low threshold laser devices. We demonstrate the fabrication of 60 nm thin zinc-blende AlN microdisks including cubic GaN quantum dots using dry chemical etching techniques. Scanning electron microscopy analysis reveals the morphology with smooth surfaces of the microdisks. Micro-photoluminescence measurements exhibit optically active quantum dots. Furthermore this is the first report of resonator modes in the emission spectrum of a cubic AlN microdisk.}},
  author       = {{Bürger, M. and Kemper, R.M. and Bader, C.A. and Ruth, M. and Declair, S. and Meier, Cedrik and Förstner, Jens and As, D.J.}},
  issn         = {{0022-0248}},
  journal      = {{Journal of Crystal Growth}},
  keywords     = {{tet_topic_qd, tet_topic_microdisk}},
  pages        = {{287--290}},
  publisher    = {{Elsevier BV}},
  title        = {{{Cubic GaN quantum dots embedded in zinc-blende AlN microdisks}}},
  doi          = {{10.1016/j.jcrysgro.2012.12.058}},
  volume       = {{378}},
  year         = {{2013}},
}