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<titleInfo><title>Group III arsenide heteroepitaxy on Si(111) using SiNx nanohole masks patterned by nanosphere lithography</title></titleInfo>


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  <namePart type="given">Thomas</namePart>
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  <namePart type="given">Vinay </namePart>
  <namePart type="family">Kunnathully</namePart>
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  <namePart type="given">A.</namePart>
  <namePart type="family">Karlisch</namePart>
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  <namePart type="given">Dirk</namePart>
  <namePart type="family">Reuter</namePart>
  <role><roleTerm type="text">author</roleTerm> </role><identifier type="local">37763</identifier></name>
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  <namePart type="given">Jörg</namePart>
  <namePart type="family">Lindner</namePart>
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  <namePart>E-MRS Fall Meeting 2017</namePart>
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<originInfo><dateIssued encoding="w3cdtf">2017</dateIssued><place><placeTerm type="text">Warsaq (Poland)</placeTerm></place>
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<chicago>Riedl, Thomas, Vinay  Kunnathully, A. Karlisch, Dirk Reuter, and Jörg Lindner. “Group III Arsenide Heteroepitaxy on Si(111) Using SiNx Nanohole Masks Patterned by Nanosphere Lithography,” 2017.</chicago>
<short>T. Riedl, V. Kunnathully, A. Karlisch, D. Reuter, J. Lindner, in: 2017.</short>
<ama>Riedl T, Kunnathully V, Karlisch A, Reuter D, Lindner J. Group III arsenide heteroepitaxy on Si(111) using SiNx nanohole masks patterned by nanosphere lithography. In: ; 2017.</ama>
<bibtex>@inproceedings{Riedl_Kunnathully_Karlisch_Reuter_Lindner_2017, title={Group III arsenide heteroepitaxy on Si(111) using SiNx nanohole masks patterned by nanosphere lithography}, author={Riedl, Thomas and Kunnathully, Vinay  and Karlisch, A. and Reuter, Dirk and Lindner, Jörg}, year={2017} }</bibtex>
<mla>Riedl, Thomas, et al. &lt;i&gt;Group III Arsenide Heteroepitaxy on Si(111) Using SiNx Nanohole Masks Patterned by Nanosphere Lithography&lt;/i&gt;. 2017.</mla>
<apa>Riedl, T., Kunnathully, V., Karlisch, A., Reuter, D., &amp;#38; Lindner, J. (2017). Group III arsenide heteroepitaxy on Si(111) using SiNx nanohole masks patterned by nanosphere lithography. Presented at the E-MRS Fall Meeting 2017, Warsaq (Poland).</apa>
<ieee>T. Riedl, V. Kunnathully, A. Karlisch, D. Reuter, and J. Lindner, “Group III arsenide heteroepitaxy on Si(111) using SiNx nanohole masks patterned by nanosphere lithography,” presented at the E-MRS Fall Meeting 2017, Warsaq (Poland), 2017.</ieee>
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