@inproceedings{39873, author = {{Otterbach, Ralf and Hilleringmann, Ulrich}}, booktitle = {{Fifth International Symposium on Instrumentation and Control Technology}}, editor = {{Zhang, Guangjun and Zhao, Huijie and Wang, Zhongyu}}, issn = {{0277-786X}}, publisher = {{SPIE}}, title = {{{Piezoresistive pressure sensors in CVD diamond for high-temperature applications}}}, doi = {{10.1117/12.521928}}, year = {{2004}}, }