{"date_updated":"2023-03-21T10:04:02Z","type":"conference","publication":"Fifth International Symposium on Instrumentation and Control Technology","doi":"10.1117/12.521928","publication_status":"published","language":[{"iso":"eng"}],"editor":[{"first_name":"Guangjun","last_name":"Zhang","full_name":"Zhang, Guangjun"},{"first_name":"Huijie","full_name":"Zhao, Huijie","last_name":"Zhao"},{"full_name":"Wang, Zhongyu","last_name":"Wang","first_name":"Zhongyu"}],"date_created":"2023-01-25T09:04:49Z","user_id":"20179","citation":{"chicago":"Otterbach, Ralf, and Ulrich Hilleringmann. “Piezoresistive Pressure Sensors in CVD Diamond for High-Temperature Applications.” In <i>Fifth International Symposium on Instrumentation and Control Technology</i>, edited by Guangjun Zhang, Huijie Zhao, and Zhongyu Wang. SPIE, 2004. <a href=\"https://doi.org/10.1117/12.521928\">https://doi.org/10.1117/12.521928</a>.","short":"R. Otterbach, U. Hilleringmann, in: G. Zhang, H. Zhao, Z. Wang (Eds.), Fifth International Symposium on Instrumentation and Control Technology, SPIE, 2004.","bibtex":"@inproceedings{Otterbach_Hilleringmann_2004, title={Piezoresistive pressure sensors in CVD diamond for high-temperature applications}, DOI={<a href=\"https://doi.org/10.1117/12.521928\">10.1117/12.521928</a>}, booktitle={Fifth International Symposium on Instrumentation and Control Technology}, publisher={SPIE}, author={Otterbach, Ralf and Hilleringmann, Ulrich}, editor={Zhang, Guangjun and Zhao, Huijie and Wang, Zhongyu}, year={2004} }","apa":"Otterbach, R., &#38; Hilleringmann, U. (2004). Piezoresistive pressure sensors in CVD diamond for high-temperature applications. In G. Zhang, H. Zhao, &#38; Z. Wang (Eds.), <i>Fifth International Symposium on Instrumentation and Control Technology</i>. SPIE. <a href=\"https://doi.org/10.1117/12.521928\">https://doi.org/10.1117/12.521928</a>","mla":"Otterbach, Ralf, and Ulrich Hilleringmann. “Piezoresistive Pressure Sensors in CVD Diamond for High-Temperature Applications.” <i>Fifth International Symposium on Instrumentation and Control Technology</i>, edited by Guangjun Zhang et al., SPIE, 2004, doi:<a href=\"https://doi.org/10.1117/12.521928\">10.1117/12.521928</a>.","ama":"Otterbach R, Hilleringmann U. Piezoresistive pressure sensors in CVD diamond for high-temperature applications. In: Zhang G, Zhao H, Wang Z, eds. <i>Fifth International Symposium on Instrumentation and Control Technology</i>. SPIE; 2004. doi:<a href=\"https://doi.org/10.1117/12.521928\">10.1117/12.521928</a>","ieee":"R. Otterbach and U. Hilleringmann, “Piezoresistive pressure sensors in CVD diamond for high-temperature applications,” in <i>Fifth International Symposium on Instrumentation and Control Technology</i>, 2004, doi: <a href=\"https://doi.org/10.1117/12.521928\">10.1117/12.521928</a>."},"title":"Piezoresistive pressure sensors in CVD diamond for high-temperature applications","_id":"39873","department":[{"_id":"59"}],"publication_identifier":{"issn":["0277-786X"]},"author":[{"first_name":"Ralf","last_name":"Otterbach","full_name":"Otterbach, Ralf"},{"id":"20179","last_name":"Hilleringmann","full_name":"Hilleringmann, Ulrich","first_name":"Ulrich"}],"publisher":"SPIE","year":"2004","status":"public"}