@article{39876,
  author       = {{Otterbach, R. and Hilleringmann, Ulrich and Horstmann, T.J. and Goser, K.}},
  issn         = {{0925-9635}},
  journal      = {{Diamond and Related Materials}},
  keywords     = {{Electrical and Electronic Engineering, Materials Chemistry, Mechanical Engineering, General Chemistry, Electronic, Optical and Magnetic Materials}},
  number       = {{3-7}},
  pages        = {{511--514}},
  publisher    = {{Elsevier BV}},
  title        = {{{Structures with a minimum feature size of less than 100 nm in CVD-diamond for sensor applications}}},
  doi          = {{10.1016/s0925-9635(01)00373-9}},
  volume       = {{10}},
  year         = {{2002}},
}