---
res:
  bibo_authorlist:
  - foaf_Person:
      foaf_givenName: Ulrich
      foaf_name: Hilleringmann, Ulrich
      foaf_surname: Hilleringmann
      foaf_workInfoHomepage: http://www.librecat.org/personId=20179
  - foaf_Person:
      foaf_givenName: T.
      foaf_name: Vieregge, T.
      foaf_surname: Vieregge
  - foaf_Person:
      foaf_givenName: J.T.
      foaf_name: Horstmann, J.T.
      foaf_surname: Horstmann
  bibo_doi: 10.1016/s0167-9317(00)00380-4
  bibo_issue: 1-4
  bibo_volume: 53
  dct_date: 2002^xs_gYear
  dct_isPartOf:
  - http://id.crossref.org/issn/0167-9317
  dct_language: eng
  dct_publisher: Elsevier BV@
  dct_subject:
  - Electrical and Electronic Engineering
  - Surfaces
  - Coatings and Films
  - Condensed Matter Physics
  - Atomic and Molecular Physics
  - and Optics
  - Electronic
  - Optical and Magnetic Materials
  dct_title: A structure definition technique for 25 nm lines of silicon and related
    materials@
...