{"page":"49–53","author":[{"full_name":"Hilleringmann, Ulrich","first_name":"Ulrich","last_name":"Hilleringmann","id":"20179"},{"last_name":"Vieregge","first_name":"T","full_name":"Vieregge, T"},{"full_name":"Horstmann, JT","first_name":"JT","last_name":"Horstmann"}],"status":"public","date_updated":"2023-03-21T09:59:50Z","title":"Nanometer Scale Lateral Structures of MOS Type Layers","user_id":"20179","type":"conference","_id":"39884","year":"2000","citation":{"mla":"Hilleringmann, Ulrich, et al. “Nanometer Scale Lateral Structures of MOS Type Layers.” <i>Proceedings Micro. Tec</i>, 2000, pp. 49–53.","chicago":"Hilleringmann, Ulrich, T Vieregge, and JT Horstmann. “Nanometer Scale Lateral Structures of MOS Type Layers.” In <i>Proceedings Micro. Tec</i>, 49–53, 2000.","ieee":"U. Hilleringmann, T. Vieregge, and J. Horstmann, “Nanometer Scale Lateral Structures of MOS Type Layers,” in <i>Proceedings Micro. tec</i>, 2000, pp. 49–53.","short":"U. Hilleringmann, T. Vieregge, J. Horstmann, in: Proceedings Micro. Tec, 2000, pp. 49–53.","ama":"Hilleringmann U, Vieregge T, Horstmann J. Nanometer Scale Lateral Structures of MOS Type Layers. In: <i>Proceedings Micro. Tec</i>. ; 2000:49–53.","apa":"Hilleringmann, U., Vieregge, T., &#38; Horstmann, J. (2000). Nanometer Scale Lateral Structures of MOS Type Layers. <i>Proceedings Micro. Tec</i>, 49–53.","bibtex":"@inproceedings{Hilleringmann_Vieregge_Horstmann_2000, title={Nanometer Scale Lateral Structures of MOS Type Layers}, booktitle={Proceedings Micro. tec}, author={Hilleringmann, Ulrich and Vieregge, T and Horstmann, JT}, year={2000}, pages={49–53} }"},"language":[{"iso":"eng"}],"date_created":"2023-01-25T09:10:42Z","publication":"Proceedings Micro. tec","department":[{"_id":"59"}]}