[{"title":"High rate CVD-diamond etching for high temperature pressure sensor applications","user_id":"20179","volume":1,"date_created":"2023-01-25T09:14:01Z","status":"public","department":[{"_id":"59"}],"publication":"29th European Solid-State Device Research Conference","author":[{"last_name":"Otterbach","first_name":"R.","full_name":"Otterbach, R."},{"last_name":"Hilleringmann","id":"20179","first_name":"Ulrich","full_name":"Hilleringmann, Ulrich"}],"intvolume":" 1","_id":"39890","date_updated":"2023-03-21T09:58:19Z","page":"320-323","type":"conference","citation":{"ieee":"R. Otterbach and U. Hilleringmann, “High rate CVD-diamond etching for high temperature pressure sensor applications,” in 29th European Solid-State Device Research Conference, 1999, vol. 1, pp. 320–323.","short":"R. Otterbach, U. Hilleringmann, in: 29th European Solid-State Device Research Conference, 1999, pp. 320–323.","mla":"Otterbach, R., and Ulrich Hilleringmann. “High Rate CVD-Diamond Etching for High Temperature Pressure Sensor Applications.” 29th European Solid-State Device Research Conference, vol. 1, 1999, pp. 320–23.","bibtex":"@inproceedings{Otterbach_Hilleringmann_1999, title={High rate CVD-diamond etching for high temperature pressure sensor applications}, volume={1}, booktitle={29th European Solid-State Device Research Conference}, author={Otterbach, R. and Hilleringmann, Ulrich}, year={1999}, pages={320–323} }","apa":"Otterbach, R., & Hilleringmann, U. (1999). High rate CVD-diamond etching for high temperature pressure sensor applications. 29th European Solid-State Device Research Conference, 1, 320–323.","ama":"Otterbach R, Hilleringmann U. High rate CVD-diamond etching for high temperature pressure sensor applications. In: 29th European Solid-State Device Research Conference. Vol 1. ; 1999:320-323.","chicago":"Otterbach, R., and Ulrich Hilleringmann. “High Rate CVD-Diamond Etching for High Temperature Pressure Sensor Applications.” In 29th European Solid-State Device Research Conference, 1:320–23, 1999."},"year":"1999","language":[{"iso":"eng"}]}]