{"_id":"3990","title":"The influence of the sphere material on the opening size distribution of nanosphere lithography masks","citation":{"bibtex":"@article{Riedl_Lindner_2017, series={poster V.14.62}, title={The influence of the sphere material on the opening size distribution of nanosphere lithography masks}, author={Riedl, Thomas and Lindner, Jörg}, year={2017}, collection={poster V.14.62} }","ieee":"T. Riedl and J. Lindner, “The influence of the sphere material on the opening size distribution of nanosphere lithography masks.” 2017.","mla":"Riedl, Thomas, and Jörg Lindner. <i>The Influence of the Sphere Material on the Opening Size Distribution of Nanosphere Lithography Masks</i>. 2017.","chicago":"Riedl, Thomas, and Jörg Lindner. “The Influence of the Sphere Material on the Opening Size Distribution of Nanosphere Lithography Masks.” Poster V.14.62, 2017.","apa":"Riedl, T., &#38; Lindner, J. (2017). The influence of the sphere material on the opening size distribution of nanosphere lithography masks. Presented at the E-MRS Spring Meeting 2017, Strasburg (France).","short":"T. Riedl, J. Lindner, (2017).","ama":"Riedl T, Lindner J. The influence of the sphere material on the opening size distribution of nanosphere lithography masks. 2017."},"year":"2017","series_title":"poster V.14.62","user_id":"55706","status":"public","author":[{"first_name":"Thomas","last_name":"Riedl","full_name":"Riedl, Thomas"},{"last_name":"Lindner","full_name":"Lindner, Jörg","first_name":"Jörg","id":"20797"}],"department":[{"_id":"286"},{"_id":"15"}],"language":[{"iso":"eng"}],"date_updated":"2022-01-06T07:00:05Z","date_created":"2018-08-21T11:43:10Z","conference":{"end_date":"2017-05-26","location":"Strasburg (France)","name":"E-MRS Spring Meeting 2017","start_date":"2017-05-22"},"type":"conference"}