{"publication":"ESSDERC ’94: 24th European Solid State Device Research Conference","user_id":"20179","page":"387-390","year":"1994","_id":"39908","title":"Micromechanic Pressure Sensors with Optical Readout and CMOS-Amplifiers on Silicon","citation":{"bibtex":"@inproceedings{Hilleringmann_Adams_Goser_1994, title={Micromechanic Pressure Sensors with Optical Readout and CMOS-Amplifiers on Silicon}, booktitle={ESSDERC ’94: 24th European Solid State Device Research Conference}, author={Hilleringmann, Ulrich and Adams, S. and Goser, K.}, year={1994}, pages={387–390} }","mla":"Hilleringmann, Ulrich, et al. “Micromechanic Pressure Sensors with Optical Readout and CMOS-Amplifiers on Silicon.” <i>ESSDERC ’94: 24th European Solid State Device Research Conference</i>, 1994, pp. 387–90.","ieee":"U. Hilleringmann, S. Adams, and K. Goser, “Micromechanic Pressure Sensors with Optical Readout and CMOS-Amplifiers on Silicon,” in <i>ESSDERC ’94: 24th European Solid State Device Research Conference</i>, 1994, pp. 387–390.","chicago":"Hilleringmann, Ulrich, S. Adams, and K. Goser. “Micromechanic Pressure Sensors with Optical Readout and CMOS-Amplifiers on Silicon.” In <i>ESSDERC ’94: 24th European Solid State Device Research Conference</i>, 387–90, 1994.","apa":"Hilleringmann, U., Adams, S., &#38; Goser, K. (1994). Micromechanic Pressure Sensors with Optical Readout and CMOS-Amplifiers on Silicon. <i>ESSDERC ’94: 24th European Solid State Device Research Conference</i>, 387–390.","short":"U. Hilleringmann, S. Adams, K. Goser, in: ESSDERC ’94: 24th European Solid State Device Research Conference, 1994, pp. 387–390.","ama":"Hilleringmann U, Adams S, Goser K. Micromechanic Pressure Sensors with Optical Readout and CMOS-Amplifiers on Silicon. In: <i>ESSDERC ’94: 24th European Solid State Device Research Conference</i>. ; 1994:387-390."},"type":"conference","date_created":"2023-01-25T09:24:51Z","date_updated":"2023-03-21T09:51:04Z","language":[{"iso":"eng"}],"department":[{"_id":"59"}],"author":[{"full_name":"Hilleringmann, Ulrich","last_name":"Hilleringmann","id":"20179","first_name":"Ulrich"},{"last_name":"Adams","full_name":"Adams, S.","first_name":"S."},{"first_name":"K.","last_name":"Goser","full_name":"Goser, K."}],"status":"public"}