{"department":[{"_id":"59"}],"publication":"ESSDERC ’94: 24th European Solid State Device Research Conference","date_created":"2023-01-25T09:24:51Z","citation":{"bibtex":"@inproceedings{Hilleringmann_Adams_Goser_1994, title={Micromechanic Pressure Sensors with Optical Readout and CMOS-Amplifiers on Silicon}, booktitle={ESSDERC ’94: 24th European Solid State Device Research Conference}, author={Hilleringmann, Ulrich and Adams, S. and Goser, K.}, year={1994}, pages={387–390} }","ama":"Hilleringmann U, Adams S, Goser K. Micromechanic Pressure Sensors with Optical Readout and CMOS-Amplifiers on Silicon. In: <i>ESSDERC ’94: 24th European Solid State Device Research Conference</i>. ; 1994:387-390.","apa":"Hilleringmann, U., Adams, S., &#38; Goser, K. (1994). Micromechanic Pressure Sensors with Optical Readout and CMOS-Amplifiers on Silicon. <i>ESSDERC ’94: 24th European Solid State Device Research Conference</i>, 387–390.","chicago":"Hilleringmann, Ulrich, S. Adams, and K. Goser. “Micromechanic Pressure Sensors with Optical Readout and CMOS-Amplifiers on Silicon.” In <i>ESSDERC ’94: 24th European Solid State Device Research Conference</i>, 387–90, 1994.","mla":"Hilleringmann, Ulrich, et al. “Micromechanic Pressure Sensors with Optical Readout and CMOS-Amplifiers on Silicon.” <i>ESSDERC ’94: 24th European Solid State Device Research Conference</i>, 1994, pp. 387–90.","ieee":"U. Hilleringmann, S. Adams, and K. Goser, “Micromechanic Pressure Sensors with Optical Readout and CMOS-Amplifiers on Silicon,” in <i>ESSDERC ’94: 24th European Solid State Device Research Conference</i>, 1994, pp. 387–390.","short":"U. Hilleringmann, S. Adams, K. Goser, in: ESSDERC ’94: 24th European Solid State Device Research Conference, 1994, pp. 387–390."},"language":[{"iso":"eng"}],"_id":"39908","year":"1994","user_id":"20179","type":"conference","date_updated":"2023-03-21T09:51:04Z","title":"Micromechanic Pressure Sensors with Optical Readout and CMOS-Amplifiers on Silicon","status":"public","author":[{"id":"20179","first_name":"Ulrich","last_name":"Hilleringmann","full_name":"Hilleringmann, Ulrich"},{"full_name":"Adams, S.","first_name":"S.","last_name":"Adams"},{"last_name":"Goser","first_name":"K.","full_name":"Goser, K."}],"page":"387-390"}