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   	<dc:title>Characterization of submicron NMOS devices due to visible light emission</dc:title>
   	<dc:creator>Schönstein, I.</dc:creator>
   	<dc:creator>Müller, J.</dc:creator>
   	<dc:creator>Hilleringmann, Ulrich</dc:creator>
   	<dc:creator>Goser, K.</dc:creator>
   	<dc:subject>Electrical and Electronic Engineering</dc:subject>
   	<dc:subject>Surfaces</dc:subject>
   	<dc:subject>Coatings and Films</dc:subject>
   	<dc:subject>Condensed Matter Physics</dc:subject>
   	<dc:subject>Atomic and Molecular Physics</dc:subject>
   	<dc:subject>and Optics</dc:subject>
   	<dc:subject>Electronic</dc:subject>
   	<dc:subject>Optical and Magnetic Materials</dc:subject>
   	<dc:publisher>Elsevier BV</dc:publisher>
   	<dc:date>2002</dc:date>
   	<dc:type>info:eu-repo/semantics/article</dc:type>
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   	<dc:type>http://purl.org/coar/resource_type/c_6501</dc:type>
   	<dc:identifier>https://ris.uni-paderborn.de/record/39912</dc:identifier>
   	<dc:source>Schönstein I, Müller J, Hilleringmann U, Goser K. Characterization of submicron NMOS devices due to visible light emission. &lt;i&gt;Microelectronic Engineering&lt;/i&gt;. 2002;21(1-4):363-366. doi:&lt;a href=&quot;https://doi.org/10.1016/0167-9317(93)90092-j&quot;&gt;10.1016/0167-9317(93)90092-j&lt;/a&gt;</dc:source>
   	<dc:language>eng</dc:language>
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