@inproceedings{39913,
  author       = {{Hilleringmann, Ulrich and Adam, S and Goser, K}},
  booktitle    = {{ESSDtRC’93}},
  title        = {{{Micromechanic pressure sensors with optical readout and CMOS-preamplifiers on one silicon chip: Processing and first results}}},
  year         = {{1993}},
}