{"author":[{"id":"20179","first_name":"Ulrich","last_name":"Hilleringmann","full_name":"Hilleringmann, Ulrich"},{"last_name":"Adam","full_name":"Adam, S","first_name":"S"},{"last_name":"Goser","full_name":"Goser, K","first_name":"K"}],"language":[{"iso":"eng"}],"department":[{"_id":"59"}],"type":"conference","user_id":"20179","year":"1993","title":"Micromechanic pressure sensors with optical readout and CMOS-preamplifiers on one silicon chip: Processing and first results","date_updated":"2023-03-21T09:49:46Z","status":"public","date_created":"2023-01-25T09:26:44Z","citation":{"short":"U. Hilleringmann, S. Adam, K. Goser, in: ESSDtRC’93, 1993.","ama":"Hilleringmann U, Adam S, Goser K. Micromechanic pressure sensors with optical readout and CMOS-preamplifiers on one silicon chip: Processing and first results. In: <i>ESSDtRC’93</i>. ; 1993.","bibtex":"@inproceedings{Hilleringmann_Adam_Goser_1993, title={Micromechanic pressure sensors with optical readout and CMOS-preamplifiers on one silicon chip: Processing and first results}, booktitle={ESSDtRC’93}, author={Hilleringmann, Ulrich and Adam, S and Goser, K}, year={1993} }","mla":"Hilleringmann, Ulrich, et al. “Micromechanic Pressure Sensors with Optical Readout and CMOS-Preamplifiers on One Silicon Chip: Processing and First Results.” <i>ESSDtRC’93</i>, 1993.","ieee":"U. Hilleringmann, S. Adam, and K. Goser, “Micromechanic pressure sensors with optical readout and CMOS-preamplifiers on one silicon chip: Processing and first results,” 1993.","chicago":"Hilleringmann, Ulrich, S Adam, and K Goser. “Micromechanic Pressure Sensors with Optical Readout and CMOS-Preamplifiers on One Silicon Chip: Processing and First Results.” In <i>ESSDtRC’93</i>, 1993.","apa":"Hilleringmann, U., Adam, S., &#38; Goser, K. (1993). Micromechanic pressure sensors with optical readout and CMOS-preamplifiers on one silicon chip: Processing and first results. <i>ESSDtRC’93</i>."},"_id":"39913","publication":"ESSDtRC’93"}