---
_id: '39913'
author:
- first_name: Ulrich
  full_name: Hilleringmann, Ulrich
  id: '20179'
  last_name: Hilleringmann
- first_name: S
  full_name: Adam, S
  last_name: Adam
- first_name: K
  full_name: Goser, K
  last_name: Goser
citation:
  ama: 'Hilleringmann U, Adam S, Goser K. Micromechanic pressure sensors with optical
    readout and CMOS-preamplifiers on one silicon chip: Processing and first results.
    In: <i>ESSDtRC’93</i>. ; 1993.'
  apa: 'Hilleringmann, U., Adam, S., &#38; Goser, K. (1993). Micromechanic pressure
    sensors with optical readout and CMOS-preamplifiers on one silicon chip: Processing
    and first results. <i>ESSDtRC’93</i>.'
  bibtex: '@inproceedings{Hilleringmann_Adam_Goser_1993, title={Micromechanic pressure
    sensors with optical readout and CMOS-preamplifiers on one silicon chip: Processing
    and first results}, booktitle={ESSDtRC’93}, author={Hilleringmann, Ulrich and
    Adam, S and Goser, K}, year={1993} }'
  chicago: 'Hilleringmann, Ulrich, S Adam, and K Goser. “Micromechanic Pressure Sensors
    with Optical Readout and CMOS-Preamplifiers on One Silicon Chip: Processing and
    First Results.” In <i>ESSDtRC’93</i>, 1993.'
  ieee: 'U. Hilleringmann, S. Adam, and K. Goser, “Micromechanic pressure sensors
    with optical readout and CMOS-preamplifiers on one silicon chip: Processing and
    first results,” 1993.'
  mla: 'Hilleringmann, Ulrich, et al. “Micromechanic Pressure Sensors with Optical
    Readout and CMOS-Preamplifiers on One Silicon Chip: Processing and First Results.”
    <i>ESSDtRC’93</i>, 1993.'
  short: 'U. Hilleringmann, S. Adam, K. Goser, in: ESSDtRC’93, 1993.'
date_created: 2023-01-25T09:26:44Z
date_updated: 2023-03-21T09:49:46Z
department:
- _id: '59'
language:
- iso: eng
publication: ESSDtRC’93
status: public
title: 'Micromechanic pressure sensors with optical readout and CMOS-preamplifiers
  on one silicon chip: Processing and first results'
type: conference
user_id: '20179'
year: '1993'
...