{"status":"public","keyword":["Electrical and Electronic Engineering","Surfaces","Coatings and Films","Condensed Matter Physics","Atomic and Molecular Physics","and Optics","Electronic","Optical and Magnetic Materials"],"type":"journal_article","user_id":"20179","page":"211-214","publication_status":"published","language":[{"iso":"eng"}],"volume":19,"publication_identifier":{"issn":["0167-9317"]},"date_updated":"2023-03-21T09:49:25Z","_id":"39914","doi":"10.1016/0167-9317(92)90425-q","publication":"Microelectronic Engineering","title":"Results of monolithic integration of optical waveguides, photodiodes and CMOS circuits on silicon","department":[{"_id":"59"}],"author":[{"last_name":"Hilleringmann","full_name":"Hilleringmann, Ulrich","first_name":"Ulrich","id":"20179"},{"first_name":"K.","last_name":"Goser","full_name":"Goser, K."}],"year":"2002","issue":"1-4","date_created":"2023-01-25T09:27:23Z","publisher":"Elsevier BV","intvolume":" 19","citation":{"short":"U. Hilleringmann, K. Goser, Microelectronic Engineering 19 (2002) 211–214.","ieee":"U. Hilleringmann and K. Goser, “Results of monolithic integration of optical waveguides, photodiodes and CMOS circuits on silicon,” Microelectronic Engineering, vol. 19, no. 1–4, pp. 211–214, 2002, doi: 10.1016/0167-9317(92)90425-q.","ama":"Hilleringmann U, Goser K. Results of monolithic integration of optical waveguides, photodiodes and CMOS circuits on silicon. Microelectronic Engineering. 2002;19(1-4):211-214. doi:10.1016/0167-9317(92)90425-q","bibtex":"@article{Hilleringmann_Goser_2002, title={Results of monolithic integration of optical waveguides, photodiodes and CMOS circuits on silicon}, volume={19}, DOI={10.1016/0167-9317(92)90425-q}, number={1–4}, journal={Microelectronic Engineering}, publisher={Elsevier BV}, author={Hilleringmann, Ulrich and Goser, K.}, year={2002}, pages={211–214} }","chicago":"Hilleringmann, Ulrich, and K. Goser. “Results of Monolithic Integration of Optical Waveguides, Photodiodes and CMOS Circuits on Silicon.” Microelectronic Engineering 19, no. 1–4 (2002): 211–14. https://doi.org/10.1016/0167-9317(92)90425-q.","mla":"Hilleringmann, Ulrich, and K. Goser. “Results of Monolithic Integration of Optical Waveguides, Photodiodes and CMOS Circuits on Silicon.” Microelectronic Engineering, vol. 19, no. 1–4, Elsevier BV, 2002, pp. 211–14, doi:10.1016/0167-9317(92)90425-q.","apa":"Hilleringmann, U., & Goser, K. (2002). Results of monolithic integration of optical waveguides, photodiodes and CMOS circuits on silicon. Microelectronic Engineering, 19(1–4), 211–214. https://doi.org/10.1016/0167-9317(92)90425-q"}}