---
res:
  bibo_authorlist:
  - foaf_Person:
      foaf_givenName: S.
      foaf_name: Adams, S.
      foaf_surname: Adams
  - foaf_Person:
      foaf_givenName: Ulrich
      foaf_name: Hilleringmann, Ulrich
      foaf_surname: Hilleringmann
      foaf_workInfoHomepage: http://www.librecat.org/personId=20179
  - foaf_Person:
      foaf_givenName: K.
      foaf_name: Goser, K.
      foaf_surname: Goser
  bibo_doi: 10.1016/0167-9317(92)90420-v
  bibo_issue: 1-4
  bibo_volume: 19
  dct_date: 2002^xs_gYear
  dct_isPartOf:
  - http://id.crossref.org/issn/0167-9317
  dct_language: eng
  dct_publisher: Elsevier BV@
  dct_subject:
  - Electrical and Electronic Engineering
  - Surfaces
  - Coatings and Films
  - Condensed Matter Physics
  - Atomic and Molecular Physics
  - and Optics
  - Electronic
  - Optical and Magnetic Materials
  dct_title: CMOS compatible micromachining by dry silicon-etching techniques@
...