@article{39919,
  author       = {{Hilleringmann, Ulrich and Knospe, K. and Heite, C. and Schumacher, K. and Goser, K.}},
  issn         = {{0167-9317}},
  journal      = {{Microelectronic Engineering}},
  keywords     = {{Electrical and Electronic Engineering, Surfaces, Coatings and Films, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials}},
  number       = {{1-4}},
  pages        = {{289--292}},
  publisher    = {{Elsevier BV}},
  title        = {{{A silicon based technology for monolithic integration of waveguides and VLSI CMOS circuits}}},
  doi          = {{10.1016/0167-9317(91)90231-2}},
  volume       = {{15}},
  year         = {{2002}},
}