[{"department":[{"_id":"286"}],"type":"conference","date_created":"2018-08-21T12:33:59Z","citation":{"bibtex":"@article{Riedl_Lindner_2016, series={contributed talk E.13.5}, title={Automated SEM image analysis of the opening size distribution of nanosphere lithography masks and their origins }, author={Riedl, Thomas and Lindner, Jörg}, year={2016}, collection={contributed talk E.13.5} }","short":"T. Riedl, J. Lindner, (2016).","ama":"Riedl T, Lindner J. Automated SEM image analysis of the opening size distribution of nanosphere lithography masks and their origins . 2016.","chicago":"Riedl, Thomas, and Jörg Lindner. “Automated SEM Image Analysis of the Opening Size Distribution of Nanosphere Lithography Masks and Their Origins .” Contributed Talk E.13.5, 2016.","ieee":"T. Riedl and J. Lindner, “Automated SEM image analysis of the opening size distribution of nanosphere lithography masks and their origins .” 2016.","mla":"Riedl, Thomas, and Jörg Lindner. <i>Automated SEM Image Analysis of the Opening Size Distribution of Nanosphere Lithography Masks and Their Origins </i>. 2016.","apa":"Riedl, T., &#38; Lindner, J. (2016). Automated SEM image analysis of the opening size distribution of nanosphere lithography masks and their origins . Presented at the E-MRS Fall Meeting 2016, Warsaw (Poland)."},"user_id":"55706","series_title":"contributed talk E.13.5","_id":"4011","language":[{"iso":"eng"}],"date_updated":"2022-01-06T07:00:07Z","conference":{"end_date":"2016-09-22","location":"Warsaw (Poland)","start_date":"2016-09-19","name":"E-MRS Fall Meeting 2016"},"author":[{"id":"36950","full_name":"Riedl, Thomas","first_name":"Thomas","last_name":"Riedl"},{"full_name":"Lindner, Jörg","first_name":"Jörg","last_name":"Lindner","id":"20797"}],"title":"Automated SEM image analysis of the opening size distribution of nanosphere lithography masks and their origins ","status":"public","year":"2016"}]