<?xml version="1.0" encoding="UTF-8"?>

<modsCollection xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns="http://www.loc.gov/mods/v3" xsi:schemaLocation="http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-3.xsd">
<mods version="3.3">

<genre>conference paper</genre>

<titleInfo><title>Automated SEM image analysis of the opening size distribution of nanosphere lithography masks and their origins </title></titleInfo>





<name type="personal">
  <namePart type="given">Thomas</namePart>
  <namePart type="family">Riedl</namePart>
  <role><roleTerm type="text">author</roleTerm> </role><identifier type="local">36950</identifier></name>
<name type="personal">
  <namePart type="given">Jörg</namePart>
  <namePart type="family">Lindner</namePart>
  <role><roleTerm type="text">author</roleTerm> </role><identifier type="local">20797</identifier></name>







<name type="corporate">
  <namePart></namePart>
  <identifier type="local">286</identifier>
  <role>
    <roleTerm type="text">department</roleTerm>
  </role>
</name>



<name type="conference">
  <namePart>E-MRS Fall Meeting 2016</namePart>
</name>







<originInfo><dateIssued encoding="w3cdtf">2016</dateIssued><place><placeTerm type="text">Warsaw (Poland)</placeTerm></place>
</originInfo>
<language><languageTerm authority="iso639-2b" type="code">eng</languageTerm>
</language>



<relatedItem type="host">
<part>
</part>
</relatedItem>


<extension>
<bibliographicCitation>
<bibtex>@article{Riedl_Lindner_2016, series={contributed talk E.13.5}, title={Automated SEM image analysis of the opening size distribution of nanosphere lithography masks and their origins }, author={Riedl, Thomas and Lindner, Jörg}, year={2016}, collection={contributed talk E.13.5} }</bibtex>
<chicago>Riedl, Thomas, and Jörg Lindner. “Automated SEM Image Analysis of the Opening Size Distribution of Nanosphere Lithography Masks and Their Origins .” Contributed Talk E.13.5, 2016.</chicago>
<short>T. Riedl, J. Lindner, (2016).</short>
<ama>Riedl T, Lindner J. Automated SEM image analysis of the opening size distribution of nanosphere lithography masks and their origins . 2016.</ama>
<ieee>T. Riedl and J. Lindner, “Automated SEM image analysis of the opening size distribution of nanosphere lithography masks and their origins .” 2016.</ieee>
<mla>Riedl, Thomas, and Jörg Lindner. &lt;i&gt;Automated SEM Image Analysis of the Opening Size Distribution of Nanosphere Lithography Masks and Their Origins &lt;/i&gt;. 2016.</mla>
<apa>Riedl, T., &amp;#38; Lindner, J. (2016). Automated SEM image analysis of the opening size distribution of nanosphere lithography masks and their origins . Presented at the E-MRS Fall Meeting 2016, Warsaw (Poland).</apa>
</bibliographicCitation>
</extension>
<recordInfo><recordIdentifier>4011</recordIdentifier><recordCreationDate encoding="w3cdtf">2018-08-21T12:33:59Z</recordCreationDate><recordChangeDate encoding="w3cdtf">2022-01-06T07:00:07Z</recordChangeDate>
</recordInfo>
</mods>
</modsCollection>
