{"title":"Three-dimensional analysis of mask-clogging effects on the morphology of nanoparticles fabricated by nanosphere lithography","year":"2015","type":"conference","department":[{"_id":"286"},{"_id":"15"}],"language":[{"iso":"eng"}],"conference":{"start_date":"2015-05-11","name":"E-MRS Spring Meeting 2015","location":"Lille (France)","end_date":"2015-05-15"},"user_id":"55706","author":[{"first_name":"Christoph","id":"30380","last_name":"Brodehl","full_name":"Brodehl, Christoph"},{"last_name":"Riedl","full_name":"Riedl, Thomas","id":"36950","first_name":"Thomas"},{"last_name":"Greulich-Weber","full_name":"Greulich-Weber, Siegmund","first_name":"Siegmund"},{"last_name":"Lindner","full_name":"Lindner, Jörg","first_name":"Jörg","id":"20797"}],"_id":"4020","citation":{"bibtex":"@inproceedings{Brodehl_Riedl_Greulich-Weber_Lindner_2015, title={Three-dimensional analysis of mask-clogging effects on the morphology of nanoparticles fabricated by nanosphere lithography}, author={Brodehl, Christoph and Riedl, Thomas and Greulich-Weber, Siegmund and Lindner, Jörg}, year={2015} }","mla":"Brodehl, Christoph, et al. Three-Dimensional Analysis of Mask-Clogging Effects on the Morphology of Nanoparticles Fabricated by Nanosphere Lithography. 2015.","ama":"Brodehl C, Riedl T, Greulich-Weber S, Lindner J. Three-dimensional analysis of mask-clogging effects on the morphology of nanoparticles fabricated by nanosphere lithography. In: ; 2015.","short":"C. Brodehl, T. Riedl, S. Greulich-Weber, J. Lindner, in: 2015.","chicago":"Brodehl, Christoph, Thomas Riedl, Siegmund Greulich-Weber, and Jörg Lindner. “Three-Dimensional Analysis of Mask-Clogging Effects on the Morphology of Nanoparticles Fabricated by Nanosphere Lithography,” 2015.","ieee":"C. Brodehl, T. Riedl, S. Greulich-Weber, and J. Lindner, “Three-dimensional analysis of mask-clogging effects on the morphology of nanoparticles fabricated by nanosphere lithography,” presented at the E-MRS Spring Meeting 2015, Lille (France), 2015.","apa":"Brodehl, C., Riedl, T., Greulich-Weber, S., & Lindner, J. (2015). Three-dimensional analysis of mask-clogging effects on the morphology of nanoparticles fabricated by nanosphere lithography. Presented at the E-MRS Spring Meeting 2015, Lille (France)."},"date_created":"2018-08-21T12:56:43Z","date_updated":"2022-01-06T07:00:07Z","status":"public"}