{"citation":{"ieee":"C. Brodehl, T. Riedl, S. Greulich-Weber, and J. Lindner, “Three-dimensional analysis of mask-clogging effects on the morphology of nanoparticles fabricated by nanosphere lithography,” presented at the E-MRS Spring Meeting 2015, Lille (France), 2015.","short":"C. Brodehl, T. Riedl, S. Greulich-Weber, J. Lindner, in: 2015.","bibtex":"@inproceedings{Brodehl_Riedl_Greulich-Weber_Lindner_2015, title={Three-dimensional analysis of mask-clogging effects on the morphology of nanoparticles fabricated by nanosphere lithography}, author={Brodehl, Christoph and Riedl, Thomas and Greulich-Weber, Siegmund and Lindner, Jörg}, year={2015} }","mla":"Brodehl, Christoph, et al. <i>Three-Dimensional Analysis of Mask-Clogging Effects on the Morphology of Nanoparticles Fabricated by Nanosphere Lithography</i>. 2015.","chicago":"Brodehl, Christoph, Thomas Riedl, Siegmund Greulich-Weber, and Jörg Lindner. “Three-Dimensional Analysis of Mask-Clogging Effects on the Morphology of Nanoparticles Fabricated by Nanosphere Lithography,” 2015.","ama":"Brodehl C, Riedl T, Greulich-Weber S, Lindner J. Three-dimensional analysis of mask-clogging effects on the morphology of nanoparticles fabricated by nanosphere lithography. In: ; 2015.","apa":"Brodehl, C., Riedl, T., Greulich-Weber, S., &#38; Lindner, J. (2015). Three-dimensional analysis of mask-clogging effects on the morphology of nanoparticles fabricated by nanosphere lithography. Presented at the E-MRS Spring Meeting 2015, Lille (France)."},"language":[{"iso":"eng"}],"_id":"4020","year":"2015","conference":{"end_date":"2015-05-15","location":"Lille (France)","start_date":"2015-05-11","name":"E-MRS Spring Meeting 2015"},"date_created":"2018-08-21T12:56:43Z","status":"public","author":[{"full_name":"Brodehl, Christoph","id":"30380","last_name":"Brodehl","first_name":"Christoph"},{"first_name":"Thomas","last_name":"Riedl","id":"36950","full_name":"Riedl, Thomas"},{"first_name":"Siegmund","last_name":"Greulich-Weber","full_name":"Greulich-Weber, Siegmund"},{"full_name":"Lindner, Jörg","first_name":"Jörg","last_name":"Lindner","id":"20797"}],"user_id":"55706","type":"conference","date_updated":"2022-01-06T07:00:07Z","title":"Three-dimensional analysis of mask-clogging effects on the morphology of nanoparticles fabricated by nanosphere lithography","department":[{"_id":"286"},{"_id":"15"}]}