<?xml version="1.0" encoding="UTF-8"?>

<modsCollection xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns="http://www.loc.gov/mods/v3" xsi:schemaLocation="http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-3.xsd">
<mods version="3.3">

<genre>conference paper</genre>

<titleInfo><title>Structure and surface chemistry analysis of ultra-thin reactive ion etched GaAs (111) nanopillars</title></titleInfo>





<name type="personal">
  <namePart type="given">Thomas</namePart>
  <namePart type="family">Riedl</namePart>
  <role><roleTerm type="text">author</roleTerm> </role><identifier type="local">36950</identifier></name>
<name type="personal">
  <namePart type="given">A.</namePart>
  <namePart type="family">Kovács</namePart>
  <role><roleTerm type="text">author</roleTerm> </role></name>
<name type="personal">
  <namePart type="given">D.</namePart>
  <namePart type="family">Meertens</namePart>
  <role><roleTerm type="text">author</roleTerm> </role></name>
<name type="personal">
  <namePart type="given">Jörg</namePart>
  <namePart type="family">Lindner</namePart>
  <role><roleTerm type="text">author</roleTerm> </role><identifier type="local">20797</identifier></name>







<name type="corporate">
  <namePart></namePart>
  <identifier type="local">286</identifier>
  <role>
    <roleTerm type="text">department</roleTerm>
  </role>
</name>



<name type="conference">
  <namePart>European Materials Research Society Fall Meeting 2014</namePart>
</name>







<originInfo><dateIssued encoding="w3cdtf">2014</dateIssued><place><placeTerm type="text">Warsaw (Poland)</placeTerm></place>
</originInfo>
<language><languageTerm authority="iso639-2b" type="code">eng</languageTerm>
</language>



<relatedItem type="host">
<part>
</part>
</relatedItem>


<extension>
<bibliographicCitation>
<apa>Riedl, T., Kovács, A., Meertens, D., &amp;#38; Lindner, J. (2014). Structure and surface chemistry analysis of ultra-thin reactive ion etched GaAs (111) nanopillars. Presented at the European Materials Research Society Fall Meeting 2014, Warsaw (Poland).</apa>
<bibtex>@inproceedings{Riedl_Kovács_Meertens_Lindner_2014, title={Structure and surface chemistry analysis of ultra-thin reactive ion etched GaAs (111) nanopillars}, author={Riedl, Thomas and Kovács, A. and Meertens, D. and Lindner, Jörg}, year={2014} }</bibtex>
<mla>Riedl, Thomas, et al. &lt;i&gt;Structure and Surface Chemistry Analysis of Ultra-Thin Reactive Ion Etched GaAs (111) Nanopillars&lt;/i&gt;. 2014.</mla>
<short>T. Riedl, A. Kovács, D. Meertens, J. Lindner, in: 2014.</short>
<chicago>Riedl, Thomas, A. Kovács, D. Meertens, and Jörg Lindner. “Structure and Surface Chemistry Analysis of Ultra-Thin Reactive Ion Etched GaAs (111) Nanopillars,” 2014.</chicago>
<ieee>T. Riedl, A. Kovács, D. Meertens, and J. Lindner, “Structure and surface chemistry analysis of ultra-thin reactive ion etched GaAs (111) nanopillars,” presented at the European Materials Research Society Fall Meeting 2014, Warsaw (Poland), 2014.</ieee>
<ama>Riedl T, Kovács A, Meertens D, Lindner J. Structure and surface chemistry analysis of ultra-thin reactive ion etched GaAs (111) nanopillars. In: ; 2014.</ama>
</bibliographicCitation>
</extension>
<recordInfo><recordIdentifier>4078</recordIdentifier><recordCreationDate encoding="w3cdtf">2018-08-22T12:48:37Z</recordCreationDate><recordChangeDate encoding="w3cdtf">2022-01-06T07:00:13Z</recordChangeDate>
</recordInfo>
</mods>
</modsCollection>
