{"ddc":["530"],"publication_status":"published","doi":"10.1117/2.1201310.005154","file":[{"date_updated":"2018-08-23T13:09:31Z","date_created":"2018-08-23T13:09:31Z","file_size":466277,"creator":"hclaudia","access_level":"closed","content_type":"application/pdf","relation":"main_file","file_id":"4108","file_name":"Nanosphere lithography for device fabrication.pdf","success":1}],"has_accepted_license":"1","file_date_updated":"2018-08-23T13:09:31Z","date_created":"2018-08-23T13:07:06Z","type":"journal_article","date_updated":"2022-01-06T07:00:18Z","publication":"SPIE Newsroom","article_type":"original","year":"2013","status":"public","author":[{"first_name":"Jörg","full_name":"Lindner, Jörg","last_name":"Lindner","id":"20797"}],"publisher":"SPIE-Intl Soc Optical Eng","_id":"4107","title":"Nanosphere lithography for device fabrication","publication_identifier":{"issn":["1818-2259"]},"department":[{"_id":"15"},{"_id":"286"}],"user_id":"55706","citation":{"bibtex":"@article{Lindner_2013, title={Nanosphere lithography for device fabrication}, DOI={<a href=\"https://doi.org/10.1117/2.1201310.005154\">10.1117/2.1201310.005154</a>}, journal={SPIE Newsroom}, publisher={SPIE-Intl Soc Optical Eng}, author={Lindner, Jörg}, year={2013} }","chicago":"Lindner, Jörg. “Nanosphere Lithography for Device Fabrication.” <i>SPIE Newsroom</i>, 2013. <a href=\"https://doi.org/10.1117/2.1201310.005154\">https://doi.org/10.1117/2.1201310.005154</a>.","short":"J. Lindner, SPIE Newsroom (2013).","ama":"Lindner J. Nanosphere lithography for device fabrication. <i>SPIE Newsroom</i>. 2013. doi:<a href=\"https://doi.org/10.1117/2.1201310.005154\">10.1117/2.1201310.005154</a>","mla":"Lindner, Jörg. “Nanosphere Lithography for Device Fabrication.” <i>SPIE Newsroom</i>, SPIE-Intl Soc Optical Eng, 2013, doi:<a href=\"https://doi.org/10.1117/2.1201310.005154\">10.1117/2.1201310.005154</a>.","ieee":"J. Lindner, “Nanosphere lithography for device fabrication,” <i>SPIE Newsroom</i>, 2013.","apa":"Lindner, J. (2013). Nanosphere lithography for device fabrication. <i>SPIE Newsroom</i>. <a href=\"https://doi.org/10.1117/2.1201310.005154\">https://doi.org/10.1117/2.1201310.005154</a>"}}