{"intvolume":" 7","issue":"1","citation":{"mla":"Tschumak, Elena, et al. “Non-Polar Cubic AlGaN/GaN HFETs Grown by MBE on Ar+implanted 3C-SiC (001).” Physica Status Solidi (C), vol. 7, no. 1, Wiley, 2009, pp. 104–07, doi:10.1002/pssc.200982615.","bibtex":"@article{Tschumak_Lindner_Bürger_Lischka_Nagasawa_Abe_As_2009, title={Non-polar cubic AlGaN/GaN HFETs grown by MBE on Ar+implanted 3C-SiC (001)}, volume={7}, DOI={10.1002/pssc.200982615}, number={1}, journal={physica status solidi (c)}, publisher={Wiley}, author={Tschumak, Elena and Lindner, Jörg and Bürger, M. and Lischka, K. and Nagasawa, H. and Abe, M. and As, Donald}, year={2009}, pages={104–107} }","ieee":"E. Tschumak et al., “Non-polar cubic AlGaN/GaN HFETs grown by MBE on Ar+implanted 3C-SiC (001),” physica status solidi (c), vol. 7, no. 1, pp. 104–107, 2009.","chicago":"Tschumak, Elena, Jörg Lindner, M. Bürger, K. Lischka, H. Nagasawa, M. Abe, and Donald As. “Non-Polar Cubic AlGaN/GaN HFETs Grown by MBE on Ar+implanted 3C-SiC (001).” Physica Status Solidi (C) 7, no. 1 (2009): 104–7. https://doi.org/10.1002/pssc.200982615.","apa":"Tschumak, E., Lindner, J., Bürger, M., Lischka, K., Nagasawa, H., Abe, M., & As, D. (2009). Non-polar cubic AlGaN/GaN HFETs grown by MBE on Ar+implanted 3C-SiC (001). Physica Status Solidi (C), 7(1), 104–107. https://doi.org/10.1002/pssc.200982615","short":"E. Tschumak, J. Lindner, M. Bürger, K. Lischka, H. Nagasawa, M. Abe, D. As, Physica Status Solidi (C) 7 (2009) 104–107.","ama":"Tschumak E, Lindner J, Bürger M, et al. Non-polar cubic AlGaN/GaN HFETs grown by MBE on Ar+implanted 3C-SiC (001). physica status solidi (c). 2009;7(1):104-107. doi:10.1002/pssc.200982615"},"publication":"physica status solidi (c)","department":[{"_id":"15"},{"_id":"286"}],"publication_identifier":{"issn":["1862-6351","1610-1642"]},"publication_status":"published","date_created":"2018-08-28T12:15:20Z","status":"public","abstract":[{"text":"The growth of cubic group III-nitrides is a direct way to eliminate polarization effects, which inherently limit the fabrication of normally-off heterojunction field-effect transistors (HFETs) in GaN technology. HFET structures were fabricated of non-polar cubic AlGaN/GaN hetero layers grown by plasma assisted molecular beam epitaxy (MBE) on free standing 3C-SiC (001). The electrical insulation of 3C-SiC was realised by Ar+ implantation before c-AlGaN/GaN MBE. The structural properties of the epilayers were studied by highresolution x-ray diffraction (HRXRD). HFETs with normally off and normally-on characteristics were fabricated of cubic AlGaN/GaN. Capacitance-voltage (CV) characteristics of thegate contact were performed to detect the electron channel at the c-AlGaN/GaN hetero interface.","lang":"eng"}],"file_date_updated":"2018-08-28T12:16:11Z","doi":"10.1002/pssc.200982615","file":[{"file_size":213837,"file_id":"4197","success":1,"content_type":"application/pdf","date_updated":"2018-08-28T12:16:11Z","file_name":"Nonpolar cubic AlGaN-GaN HFETs grown by MBE on Ar+ implanted 3C SiC (001).pdf","date_created":"2018-08-28T12:16:11Z","creator":"hclaudia","relation":"main_file","access_level":"closed"}],"has_accepted_license":"1","article_type":"original","ddc":["530"],"publisher":"Wiley","language":[{"iso":"eng"}],"_id":"4196","title":"Non-polar cubic AlGaN/GaN HFETs grown by MBE on Ar+implanted 3C-SiC (001)","type":"journal_article","volume":7,"page":"104-107","date_updated":"2022-01-06T07:00:33Z","author":[{"last_name":"Tschumak","full_name":"Tschumak, Elena","first_name":"Elena"},{"full_name":"Lindner, Jörg","last_name":"Lindner","first_name":"Jörg","id":"20797"},{"full_name":"Bürger, M.","last_name":"Bürger","first_name":"M."},{"full_name":"Lischka, K.","last_name":"Lischka","first_name":"K."},{"first_name":"H.","full_name":"Nagasawa, H.","last_name":"Nagasawa"},{"first_name":"M.","last_name":"Abe","full_name":"Abe, M."},{"first_name":"Donald","full_name":"As, Donald","last_name":"As"}],"year":"2009","user_id":"55706"}