{"year":"2009","doi":"10.1016/j.nimb.2009.01.052","file_date_updated":"2018-08-28T13:05:32Z","ddc":["530"],"publication_status":"published","publisher":"Elsevier BV","publication":"Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms","status":"public","has_accepted_license":"1","publication_identifier":{"issn":["0168-583X"]},"file":[{"date_updated":"2018-08-28T13:05:32Z","success":1,"relation":"main_file","content_type":"application/pdf","date_created":"2018-08-28T13:05:32Z","file_name":"Regular Silicon Surface Patterns by Local Swelling Induced by He Implantation through Nanosphere Lithography Masks.pdf","access_level":"closed","file_id":"4222","creator":"hclaudia","file_size":467219}],"_id":"4221","type":"journal_article","user_id":"55706","abstract":[{"lang":"eng","text":"Nanopatterning of silicon surfaces by means of He+ ion implantation through self-organized colloidal\r\nmasks is reported for the first time. Nanosphere lithography (NSL) masks with mask openings of 46–\r\n230 nm width were deposited on Si(100) wafers. He+ ions were implanted through these masks in order\r\nto induce a local cavity formation and Si surface swelling. The surface morphology and the subsurface\r\nstructure were studied using atomic force microscopy (AFM) and cross-sectional transmission electron\r\nmicroscopy (XTEM), respectively, as a function of mask and implantation parameters. It is demonstrated\r\nthat regular arrays of both individual hillocks and trough-like circular rings can be generated."}],"intvolume":"       267","issue":"8-9","date_updated":"2022-01-06T07:00:38Z","date_created":"2018-08-28T13:04:23Z","citation":{"ama":"Lindner J, Seider C, Fischer F, Weinl M, Stritzker B. Regular surface patterns by local swelling induced by He implantation into silicon through nanosphere lithography masks. <i>Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms</i>. 2009;267(8-9):1394-1397. doi:<a href=\"https://doi.org/10.1016/j.nimb.2009.01.052\">10.1016/j.nimb.2009.01.052</a>","chicago":"Lindner, Jörg, C. Seider, F. Fischer, M. Weinl, and B. Stritzker. “Regular Surface Patterns by Local Swelling Induced by He Implantation into Silicon through Nanosphere Lithography Masks.” <i>Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms</i> 267, no. 8–9 (2009): 1394–97. <a href=\"https://doi.org/10.1016/j.nimb.2009.01.052\">https://doi.org/10.1016/j.nimb.2009.01.052</a>.","ieee":"J. Lindner, C. Seider, F. Fischer, M. Weinl, and B. Stritzker, “Regular surface patterns by local swelling induced by He implantation into silicon through nanosphere lithography masks,” <i>Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms</i>, vol. 267, no. 8–9, pp. 1394–1397, 2009.","bibtex":"@article{Lindner_Seider_Fischer_Weinl_Stritzker_2009, title={Regular surface patterns by local swelling induced by He implantation into silicon through nanosphere lithography masks}, volume={267}, DOI={<a href=\"https://doi.org/10.1016/j.nimb.2009.01.052\">10.1016/j.nimb.2009.01.052</a>}, number={8–9}, journal={Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms}, publisher={Elsevier BV}, author={Lindner, Jörg and Seider, C. and Fischer, F. and Weinl, M. and Stritzker, B.}, year={2009}, pages={1394–1397} }","mla":"Lindner, Jörg, et al. “Regular Surface Patterns by Local Swelling Induced by He Implantation into Silicon through Nanosphere Lithography Masks.” <i>Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms</i>, vol. 267, no. 8–9, Elsevier BV, 2009, pp. 1394–97, doi:<a href=\"https://doi.org/10.1016/j.nimb.2009.01.052\">10.1016/j.nimb.2009.01.052</a>.","apa":"Lindner, J., Seider, C., Fischer, F., Weinl, M., &#38; Stritzker, B. (2009). Regular surface patterns by local swelling induced by He implantation into silicon through nanosphere lithography masks. <i>Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms</i>, <i>267</i>(8–9), 1394–1397. <a href=\"https://doi.org/10.1016/j.nimb.2009.01.052\">https://doi.org/10.1016/j.nimb.2009.01.052</a>","short":"J. Lindner, C. Seider, F. Fischer, M. Weinl, B. Stritzker, Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 267 (2009) 1394–1397."},"author":[{"last_name":"Lindner","id":"20797","full_name":"Lindner, Jörg","first_name":"Jörg"},{"full_name":"Seider, C.","first_name":"C.","last_name":"Seider"},{"last_name":"Fischer","first_name":"F.","full_name":"Fischer, F."},{"first_name":"M.","full_name":"Weinl, M.","last_name":"Weinl"},{"last_name":"Stritzker","full_name":"Stritzker, B.","first_name":"B."}],"page":"1394-1397","article_type":"original","volume":267,"title":"Regular surface patterns by local swelling induced by He implantation into silicon through nanosphere lithography masks","language":[{"iso":"eng"}],"extern":"1"}