{"language":[{"iso":"eng"}],"date_updated":"2022-01-06T07:01:04Z","title":"Modification of block copolymer lithography masks by O2 plasma treatment: Insights from lift off experiments, nanopore etching and free membranes","publication":"To be submitted","_id":"4444","status":"public","date_created":"2018-09-18T11:42:30Z","publication_status":"draft","author":[{"first_name":"Katharina","id":"11305","last_name":"Brassat","full_name":"Brassat, Katharina"},{"id":"44586","first_name":"Daniel","last_name":"Kool","full_name":"Kool, Daniel"},{"full_name":"Lindner, Jörg","last_name":"Lindner","id":"20797","first_name":"Jörg"}],"year":"2018","user_id":"55706","citation":{"short":"K. Brassat, D. Kool, J. Lindner, To Be Submitted (n.d.).","ieee":"K. Brassat, D. Kool, and J. Lindner, “Modification of block copolymer lithography masks by O2 plasma treatment: Insights from lift off experiments, nanopore etching and free membranes,” <i>To be submitted</i>.","bibtex":"@article{Brassat_Kool_Lindner, title={Modification of block copolymer lithography masks by O2 plasma treatment: Insights from lift off experiments, nanopore etching and free membranes}, journal={To be submitted}, author={Brassat, Katharina and Kool, Daniel and Lindner, Jörg} }","ama":"Brassat K, Kool D, Lindner J. Modification of block copolymer lithography masks by O2 plasma treatment: Insights from lift off experiments, nanopore etching and free membranes. <i>To be submitted</i>.","chicago":"Brassat, Katharina, Daniel Kool, and Jörg Lindner. “Modification of Block Copolymer Lithography Masks by O2 Plasma Treatment: Insights from Lift off Experiments, Nanopore Etching and Free Membranes.” <i>To Be Submitted</i>, n.d.","mla":"Brassat, Katharina, et al. “Modification of Block Copolymer Lithography Masks by O2 Plasma Treatment: Insights from Lift off Experiments, Nanopore Etching and Free Membranes.” <i>To Be Submitted</i>.","apa":"Brassat, K., Kool, D., &#38; Lindner, J. (n.d.). Modification of block copolymer lithography masks by O2 plasma treatment: Insights from lift off experiments, nanopore etching and free membranes. <i>To Be Submitted</i>."},"type":"journal_article","department":[{"_id":"15"},{"_id":"286"}]}