{"type":"journal_article","_id":"58607","title":"Complementary spectroscopic and electrochemical analysis of the sealing of micropores in hexamethyldisilazane plasma polymer films by Al 2 O 3 atomic layer deposition","citation":{"bibtex":"@article{Xie_Zanders_Preischel_de los Arcos de Pedro_Devi_Grundmeier_2023, title={Complementary spectroscopic and electrochemical analysis of the sealing of micropores in hexamethyldisilazane plasma polymer films by Al 2 O 3 atomic layer deposition}, DOI={<a href=\"https://doi.org/10.1002/sia.7256\">10.1002/sia.7256</a>}, journal={Surface and Interface Analysis}, author={Xie, Xiaofan and Zanders, David and Preischel, Florian and de los Arcos de Pedro, Maria Teresa and Devi, Anjana and Grundmeier, Guido}, year={2023} }","chicago":"Xie, Xiaofan, David Zanders, Florian Preischel, Maria Teresa de los Arcos de Pedro, Anjana Devi, and Guido Grundmeier. “Complementary Spectroscopic and Electrochemical Analysis of the Sealing of Micropores in Hexamethyldisilazane Plasma Polymer Films by Al 2 O 3 Atomic Layer Deposition.” <i>Surface and Interface Analysis</i>, 2023. <a href=\"https://doi.org/10.1002/sia.7256\">https://doi.org/10.1002/sia.7256</a>.","apa":"Xie, X., Zanders, D., Preischel, F., de los Arcos de Pedro, M. T., Devi, A., &#38; Grundmeier, G. (2023). Complementary spectroscopic and electrochemical analysis of the sealing of micropores in hexamethyldisilazane plasma polymer films by Al 2 O 3 atomic layer deposition. <i>Surface and Interface Analysis</i>. <a href=\"https://doi.org/10.1002/sia.7256\">https://doi.org/10.1002/sia.7256</a>","ama":"Xie X, Zanders D, Preischel F, de los Arcos de Pedro MT, Devi A, Grundmeier G. Complementary spectroscopic and electrochemical analysis of the sealing of micropores in hexamethyldisilazane plasma polymer films by Al 2 O 3 atomic layer deposition. <i>Surface and Interface Analysis</i>. Published online 2023. doi:<a href=\"https://doi.org/10.1002/sia.7256\">10.1002/sia.7256</a>","short":"X. Xie, D. Zanders, F. Preischel, M.T. de los Arcos de Pedro, A. Devi, G. Grundmeier, Surface and Interface Analysis (2023).","mla":"Xie, Xiaofan, et al. “Complementary Spectroscopic and Electrochemical Analysis of the Sealing of Micropores in Hexamethyldisilazane Plasma Polymer Films by Al 2 O 3 Atomic Layer Deposition.” <i>Surface and Interface Analysis</i>, 2023, doi:<a href=\"https://doi.org/10.1002/sia.7256\">10.1002/sia.7256</a>.","ieee":"X. Xie, D. Zanders, F. Preischel, M. T. de los Arcos de Pedro, A. Devi, and G. Grundmeier, “Complementary spectroscopic and electrochemical analysis of the sealing of micropores in hexamethyldisilazane plasma polymer films by Al 2 O 3 atomic layer deposition,” <i>Surface and Interface Analysis</i>, 2023, doi: <a href=\"https://doi.org/10.1002/sia.7256\">10.1002/sia.7256</a>."},"year":"2023","publication_identifier":{"issn":["0142-2421"]},"user_id":"54556","status":"public","publication":"Surface and Interface Analysis","doi":"10.1002/sia.7256","language":[{"iso":"eng"}],"date_created":"2025-02-12T14:45:05Z","department":[{"_id":"302"}],"date_updated":"2025-02-12T14:51:57Z","author":[{"full_name":"Xie, Xiaofan","last_name":"Xie","first_name":"Xiaofan"},{"full_name":"Zanders, David","first_name":"David","last_name":"Zanders"},{"full_name":"Preischel, Florian","last_name":"Preischel","first_name":"Florian"},{"last_name":"de los Arcos de Pedro","first_name":"Maria Teresa","orcid":"0000-0002-8684-273X ","id":"54556","full_name":"de los Arcos de Pedro, Maria Teresa"},{"first_name":"Anjana","last_name":"Devi","full_name":"Devi, Anjana"},{"first_name":"Guido","last_name":"Grundmeier","full_name":"Grundmeier, Guido"}]}