Complementary spectroscopic and electrochemical analysis of the sealing of micropores in hexamethyldisilazane plasma polymer films by Al 2 O 3 atomic layer deposition - Xie, Xiaofan; Zanders, David; Preischel, Florian; de los Arcos de Pedro, Maria Teresa; Devi, Anjana; Grundmeier, Guido (Surface and Interface Analysis, 2023)
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