{"title":"PECVD and PEALD on polymer substrates (part I): Fundamentals and analysis of plasma activation and thin film growth","_id":"58610","page":"e2300150","type":"journal_article","user_id":"54556","year":"2023","publication_identifier":{"issn":["1612-8850"]},"citation":{"chicago":"Arcos de Pedro, Maria Teresa de los, Peter Awakowicz, Jan Benedikt, Beatrix Biskup, Marc Böke, Nils Boysen, Rahel Buschhaus, et al. “PECVD and PEALD on Polymer Substrates (Part I): Fundamentals and Analysis of Plasma Activation and Thin Film Growth.” <i>PLASMA PROCESSES AND POLYMERS</i>, 2023, e2300150. <a href=\"https://doi.org/10.1002/ppap.202300150\">https://doi.org/10.1002/ppap.202300150</a>.","bibtex":"@article{de los Arcos de Pedro_Awakowicz_Benedikt_Biskup_Böke_Boysen_Buschhaus_Dahlmann_Devi_Gergs_et al._2023, title={PECVD and PEALD on polymer substrates (part I): Fundamentals and analysis of plasma activation and thin film growth}, DOI={<a href=\"https://doi.org/10.1002/ppap.202300150\">10.1002/ppap.202300150</a>}, journal={PLASMA PROCESSES AND POLYMERS}, author={de los Arcos de Pedro, Maria Teresa and Awakowicz, Peter and Benedikt, Jan and Biskup, Beatrix and Böke, Marc and Boysen, Nils and Buschhaus, Rahel and Dahlmann, Rainer and Devi, Anjana and Gergs, Tobias and et al.}, year={2023}, pages={e2300150} }","ieee":"M. T. de los Arcos de Pedro <i>et al.</i>, “PECVD and PEALD on polymer substrates (part I): Fundamentals and analysis of plasma activation and thin film growth,” <i>PLASMA PROCESSES AND POLYMERS</i>, p. e2300150, 2023, doi: <a href=\"https://doi.org/10.1002/ppap.202300150\">10.1002/ppap.202300150</a>.","mla":"de los Arcos de Pedro, Maria Teresa, et al. “PECVD and PEALD on Polymer Substrates (Part I): Fundamentals and Analysis of Plasma Activation and Thin Film Growth.” <i>PLASMA PROCESSES AND POLYMERS</i>, 2023, p. e2300150, doi:<a href=\"https://doi.org/10.1002/ppap.202300150\">10.1002/ppap.202300150</a>.","short":"M.T. de los Arcos de Pedro, P. Awakowicz, J. Benedikt, B. Biskup, M. Böke, N. Boysen, R. Buschhaus, R. Dahlmann, A. Devi, T. Gergs, J. Jenderny, A. von Keudell, T.D. Kühne, S. Kusmierz, H. Müller, T. Mussenbrock, J. Trieschmann, D. Zanders, F. Zysk, G. Grundmeier, PLASMA PROCESSES AND POLYMERS (2023) e2300150.","ama":"de los Arcos de Pedro MT, Awakowicz P, Benedikt J, et al. PECVD and PEALD on polymer substrates (part I): Fundamentals and analysis of plasma activation and thin film growth. <i>PLASMA PROCESSES AND POLYMERS</i>. Published online 2023:e2300150. doi:<a href=\"https://doi.org/10.1002/ppap.202300150\">10.1002/ppap.202300150</a>","apa":"de los Arcos de Pedro, M. T., Awakowicz, P., Benedikt, J., Biskup, B., Böke, M., Boysen, N., Buschhaus, R., Dahlmann, R., Devi, A., Gergs, T., Jenderny, J., von Keudell, A., Kühne, T. D., Kusmierz, S., Müller, H., Mussenbrock, T., Trieschmann, J., Zanders, D., Zysk, F., &#38; Grundmeier, G. (2023). PECVD and PEALD on polymer substrates (part I): Fundamentals and analysis of plasma activation and thin film growth. <i>PLASMA PROCESSES AND POLYMERS</i>, e2300150. <a href=\"https://doi.org/10.1002/ppap.202300150\">https://doi.org/10.1002/ppap.202300150</a>"},"doi":"10.1002/ppap.202300150","publication":"PLASMA PROCESSES AND POLYMERS","status":"public","author":[{"last_name":"de los Arcos de Pedro","first_name":"Maria Teresa","full_name":"de los Arcos de Pedro, Maria Teresa","id":"54556","orcid":"0000-0002-8684-273X "},{"full_name":"Awakowicz, Peter","first_name":"Peter","last_name":"Awakowicz"},{"full_name":"Benedikt, Jan","last_name":"Benedikt","first_name":"Jan"},{"first_name":"Beatrix","last_name":"Biskup","full_name":"Biskup, Beatrix"},{"first_name":"Marc","last_name":"Böke","full_name":"Böke, Marc"},{"last_name":"Boysen","first_name":"Nils","full_name":"Boysen, Nils"},{"full_name":"Buschhaus, Rahel","first_name":"Rahel","last_name":"Buschhaus"},{"first_name":"Rainer","last_name":"Dahlmann","full_name":"Dahlmann, Rainer"},{"first_name":"Anjana","last_name":"Devi","full_name":"Devi, Anjana"},{"full_name":"Gergs, Tobias","first_name":"Tobias","last_name":"Gergs"},{"first_name":"Jonathan","last_name":"Jenderny","full_name":"Jenderny, Jonathan"},{"last_name":"von Keudell","first_name":"Achim","full_name":"von Keudell, Achim"},{"full_name":"Kühne, Thomas D.","last_name":"Kühne","first_name":"Thomas D."},{"full_name":"Kusmierz, Simon","first_name":"Simon","last_name":"Kusmierz"},{"full_name":"Müller, Hendrik","last_name":"Müller","first_name":"Hendrik"},{"full_name":"Mussenbrock, Thomas","first_name":"Thomas","last_name":"Mussenbrock"},{"full_name":"Trieschmann, Jan","first_name":"Jan","last_name":"Trieschmann"},{"last_name":"Zanders","first_name":"David","full_name":"Zanders, David"},{"full_name":"Zysk, Frederik","first_name":"Frederik","last_name":"Zysk"},{"full_name":"Grundmeier, Guido","last_name":"Grundmeier","first_name":"Guido"}],"date_updated":"2025-02-12T14:54:43Z","department":[{"_id":"302"}],"date_created":"2025-02-12T14:48:27Z","language":[{"iso":"eng"}]}