thesis Quantum photonic systems in CMOS compatible silicon nitride technology Tobias Schwabe author 39217 Michael Rüsing author 225010000-0003-4682-4577 Niels Staal author Max Schwengelbeck author Laura Bollmers author 61375 Laura Padberg author 40300 Christof Eigner author 13244https://orcid.org/0000-0002-5693-3083 Christine Silberhorn author 26263 J. Christoph Scheytt author 371440000-0002-5950-6618 288 department 15 department 623 department Zenodo2024 eng 10.5281/zenodo.15124929 Schwabe, T., Rüsing, M., Staal, N., Schwengelbeck, M., Bollmers, L., Padberg, L., Eigner, C., Silberhorn, C., &#38; Scheytt, J. C. (2024). <i>Quantum photonic systems in CMOS compatible silicon nitride technology </i>. Zenodo. <a href="https://doi.org/10.5281/zenodo.15124929">https://doi.org/10.5281/zenodo.15124929</a> T. Schwabe, M. Rüsing, N. Staal, M. Schwengelbeck, L. Bollmers, L. Padberg, C. Eigner, C. Silberhorn, J.C. Scheytt, Quantum Photonic Systems in CMOS Compatible Silicon Nitride Technology , Zenodo, 2024. Schwabe, Tobias, et al. <i>Quantum Photonic Systems in CMOS Compatible Silicon Nitride Technology </i>. Zenodo, 2024, doi:<a href="https://doi.org/10.5281/zenodo.15124929">10.5281/zenodo.15124929</a>. @book{Schwabe_Rüsing_Staal_Schwengelbeck_Bollmers_Padberg_Eigner_Silberhorn_Scheytt_2024, title={Quantum photonic systems in CMOS compatible silicon nitride technology }, DOI={<a href="https://doi.org/10.5281/zenodo.15124929">10.5281/zenodo.15124929</a>}, publisher={Zenodo}, author={Schwabe, Tobias and Rüsing, Michael and Staal, Niels and Schwengelbeck, Max and Bollmers, Laura and Padberg, Laura and Eigner, Christof and Silberhorn, Christine and Scheytt, J. Christoph}, year={2024} } Schwabe T, Rüsing M, Staal N, et al. <i>Quantum Photonic Systems in CMOS Compatible Silicon Nitride Technology </i>. Zenodo; 2024. doi:<a href="https://doi.org/10.5281/zenodo.15124929">10.5281/zenodo.15124929</a> Schwabe, Tobias, Michael Rüsing, Niels Staal, Max Schwengelbeck, Laura Bollmers, Laura Padberg, Christof Eigner, Christine Silberhorn, and J. Christoph Scheytt. <i>Quantum Photonic Systems in CMOS Compatible Silicon Nitride Technology </i>. Zenodo, 2024. <a href="https://doi.org/10.5281/zenodo.15124929">https://doi.org/10.5281/zenodo.15124929</a>. T. Schwabe <i>et al.</i>, <i>Quantum photonic systems in CMOS compatible silicon nitride technology </i>. Zenodo, 2024. 592592025-04-02T11:24:23Z2025-04-03T12:34:56Z