Quantum photonic systems in CMOS compatible silicon nitride technology 
T. Schwabe, M. Rüsing, N. Staal, M. Schwengelbeck, L. Bollmers, L. Padberg, C. Eigner, C. Silberhorn, J.C. Scheytt, Quantum Photonic Systems in CMOS Compatible Silicon Nitride Technology , Zenodo, 2024.