---
_id: '59259'
author:
- first_name: Tobias
  full_name: Schwabe, Tobias
  id: '39217'
  last_name: Schwabe
- first_name: Michael
  full_name: Rüsing, Michael
  id: '22501'
  last_name: Rüsing
  orcid: 0000-0003-4682-4577
- first_name: Niels
  full_name: Staal, Niels
  last_name: Staal
- first_name: Max
  full_name: Schwengelbeck, Max
  last_name: Schwengelbeck
- first_name: Laura
  full_name: Bollmers, Laura
  id: '61375'
  last_name: Bollmers
- first_name: Laura
  full_name: Padberg, Laura
  id: '40300'
  last_name: Padberg
- first_name: Christof
  full_name: Eigner, Christof
  id: '13244'
  last_name: Eigner
  orcid: https://orcid.org/0000-0002-5693-3083
- first_name: Christine
  full_name: Silberhorn, Christine
  id: '26263'
  last_name: Silberhorn
- first_name: J. Christoph
  full_name: Scheytt, J. Christoph
  id: '37144'
  last_name: Scheytt
  orcid: '0000-0002-5950-6618 '
citation:
  ama: Schwabe T, Rüsing M, Staal N, et al. <i>Quantum Photonic Systems in CMOS Compatible
    Silicon Nitride Technology </i>. Zenodo; 2024. doi:<a href="https://doi.org/10.5281/zenodo.15124929">10.5281/zenodo.15124929</a>
  apa: Schwabe, T., Rüsing, M., Staal, N., Schwengelbeck, M., Bollmers, L., Padberg,
    L., Eigner, C., Silberhorn, C., &#38; Scheytt, J. C. (2024). <i>Quantum photonic
    systems in CMOS compatible silicon nitride technology </i>. Zenodo. <a href="https://doi.org/10.5281/zenodo.15124929">https://doi.org/10.5281/zenodo.15124929</a>
  bibtex: '@book{Schwabe_Rüsing_Staal_Schwengelbeck_Bollmers_Padberg_Eigner_Silberhorn_Scheytt_2024,
    title={Quantum photonic systems in CMOS compatible silicon nitride technology
    }, DOI={<a href="https://doi.org/10.5281/zenodo.15124929">10.5281/zenodo.15124929</a>},
    publisher={Zenodo}, author={Schwabe, Tobias and Rüsing, Michael and Staal, Niels
    and Schwengelbeck, Max and Bollmers, Laura and Padberg, Laura and Eigner, Christof
    and Silberhorn, Christine and Scheytt, J. Christoph}, year={2024} }'
  chicago: Schwabe, Tobias, Michael Rüsing, Niels Staal, Max Schwengelbeck, Laura
    Bollmers, Laura Padberg, Christof Eigner, Christine Silberhorn, and J. Christoph
    Scheytt. <i>Quantum Photonic Systems in CMOS Compatible Silicon Nitride Technology
    </i>. Zenodo, 2024. <a href="https://doi.org/10.5281/zenodo.15124929">https://doi.org/10.5281/zenodo.15124929</a>.
  ieee: T. Schwabe <i>et al.</i>, <i>Quantum photonic systems in CMOS compatible silicon
    nitride technology </i>. Zenodo, 2024.
  mla: Schwabe, Tobias, et al. <i>Quantum Photonic Systems in CMOS Compatible Silicon
    Nitride Technology </i>. Zenodo, 2024, doi:<a href="https://doi.org/10.5281/zenodo.15124929">10.5281/zenodo.15124929</a>.
  short: T. Schwabe, M. Rüsing, N. Staal, M. Schwengelbeck, L. Bollmers, L. Padberg,
    C. Eigner, C. Silberhorn, J.C. Scheytt, Quantum Photonic Systems in CMOS Compatible
    Silicon Nitride Technology , Zenodo, 2024.
date_created: 2025-04-02T11:24:23Z
date_updated: 2025-04-03T12:34:56Z
department:
- _id: '288'
- _id: '15'
- _id: '623'
doi: 10.5281/zenodo.15124929
language:
- iso: eng
publisher: Zenodo
status: public
title: 'Quantum photonic systems in CMOS compatible silicon nitride technology '
type: misc
user_id: '22501'
year: '2024'
...