{"publication":"Applied Optics","publication_identifier":{"issn":["1559-128X","2155-3165"]},"author":[{"first_name":"Lena","last_name":"Schnitzler","full_name":"Schnitzler, Lena"},{"full_name":"Neutsch, Krisztian","last_name":"Neutsch","first_name":"Krisztian"},{"first_name":"Falk","last_name":"Schellenberg","full_name":"Schellenberg, Falk"},{"last_name":"Hofmann","full_name":"Hofmann, Martin R.","first_name":"Martin R."},{"last_name":"Gerhardt","full_name":"Gerhardt, Nils Christopher","id":"115298","orcid":"0009-0002-5538-231X","first_name":"Nils Christopher"}],"user_id":"15911","publisher":"Optica Publishing Group","date_created":"2025-04-25T07:04:55Z","title":"Confocal laser scanning holographic microscopy of buried structures","publication_status":"published","intvolume":"        60","extern":"1","citation":{"short":"L. Schnitzler, K. Neutsch, F. Schellenberg, M.R. Hofmann, N.C. Gerhardt, Applied Optics 60 (2020).","apa":"Schnitzler, L., Neutsch, K., Schellenberg, F., Hofmann, M. R., &#38; Gerhardt, N. C. (2020). Confocal laser scanning holographic microscopy of buried structures. <i>Applied Optics</i>, <i>60</i>(4), Article A8. <a href=\"https://doi.org/10.1364/ao.403687\">https://doi.org/10.1364/ao.403687</a>","mla":"Schnitzler, Lena, et al. “Confocal Laser Scanning Holographic Microscopy of Buried Structures.” <i>Applied Optics</i>, vol. 60, no. 4, A8, Optica Publishing Group, 2020, doi:<a href=\"https://doi.org/10.1364/ao.403687\">10.1364/ao.403687</a>.","chicago":"Schnitzler, Lena, Krisztian Neutsch, Falk Schellenberg, Martin R. Hofmann, and Nils Christopher Gerhardt. “Confocal Laser Scanning Holographic Microscopy of Buried Structures.” <i>Applied Optics</i> 60, no. 4 (2020). <a href=\"https://doi.org/10.1364/ao.403687\">https://doi.org/10.1364/ao.403687</a>.","ama":"Schnitzler L, Neutsch K, Schellenberg F, Hofmann MR, Gerhardt NC. Confocal laser scanning holographic microscopy of buried structures. <i>Applied Optics</i>. 2020;60(4). doi:<a href=\"https://doi.org/10.1364/ao.403687\">10.1364/ao.403687</a>","bibtex":"@article{Schnitzler_Neutsch_Schellenberg_Hofmann_Gerhardt_2020, title={Confocal laser scanning holographic microscopy of buried structures}, volume={60}, DOI={<a href=\"https://doi.org/10.1364/ao.403687\">10.1364/ao.403687</a>}, number={4A8}, journal={Applied Optics}, publisher={Optica Publishing Group}, author={Schnitzler, Lena and Neutsch, Krisztian and Schellenberg, Falk and Hofmann, Martin R. and Gerhardt, Nils Christopher}, year={2020} }","ieee":"L. Schnitzler, K. Neutsch, F. Schellenberg, M. R. Hofmann, and N. C. Gerhardt, “Confocal laser scanning holographic microscopy of buried structures,” <i>Applied Optics</i>, vol. 60, no. 4, Art. no. A8, 2020, doi: <a href=\"https://doi.org/10.1364/ao.403687\">10.1364/ao.403687</a>."},"volume":60,"type":"journal_article","article_number":"A8","year":"2020","quality_controlled":"1","date_updated":"2025-04-25T07:10:58Z","status":"public","article_type":"original","abstract":[{"lang":"eng","text":"<jats:p>In this paper, we present a confocal laser scanning holographic microscope for the investigation of buried structures. The multimodal system combines high diffraction limited resolution and high signal-to-noise-ratio with the ability of phase acquisition. The amplitude and phase imaging capabilities of the system are shown on a test target. For the investigation of buried integrated semiconductor structures, we expand our system with an optical beam induced current modality that provides additional structure-sensitive contrast. We demonstrate the performance of the multimodal system by imaging the buried structures of a microcontroller through the silicon backside of its housing in reflection geometry.</jats:p>"}],"doi":"10.1364/ao.403687","_id":"59684","issue":"4","language":[{"iso":"eng"}]}