{"date_updated":"2025-05-03T08:02:10Z","department":[{"_id":"59"}],"status":"public","editor":[{"first_name":"Monuko","last_name":"du Plessis","full_name":"du Plessis, Monuko"}],"language":[{"iso":"eng"}],"_id":"59781","doi":"10.1117/12.2501307","user_id":"8282","author":[{"first_name":"Dmitry","full_name":"Petrov, Dmitry","last_name":"Petrov","id":"8282"},{"last_name":"Meyers","full_name":"Meyers, Thorsten","first_name":"Thorsten"},{"first_name":"Julia","last_name":"Reker","full_name":"Reker, Julia"},{"full_name":"Hilleringmann, Ulrich","last_name":"Hilleringmann","id":"20179","first_name":"Ulrich"}],"publication":"Fifth Conference on Sensors, MEMS, and Electro-Optic Systems","publication_status":"published","title":"Doctor blade system for the deposition of thin semiconducting films","date_created":"2025-05-03T08:01:08Z","publisher":"SPIE","citation":{"ieee":"D. Petrov, T. Meyers, J. Reker, and U. Hilleringmann, “Doctor blade system for the deposition of thin semiconducting films,” in <i>Fifth Conference on Sensors, MEMS, and Electro-Optic Systems</i>, 2019, doi: <a href=\"https://doi.org/10.1117/12.2501307\">10.1117/12.2501307</a>.","ama":"Petrov D, Meyers T, Reker J, Hilleringmann U. Doctor blade system for the deposition of thin semiconducting films. In: du Plessis M, ed. <i>Fifth Conference on Sensors, MEMS, and Electro-Optic Systems</i>. SPIE; 2019. doi:<a href=\"https://doi.org/10.1117/12.2501307\">10.1117/12.2501307</a>","mla":"Petrov, Dmitry, et al. “Doctor Blade System for the Deposition of Thin Semiconducting Films.” <i>Fifth Conference on Sensors, MEMS, and Electro-Optic Systems</i>, edited by Monuko du Plessis, SPIE, 2019, doi:<a href=\"https://doi.org/10.1117/12.2501307\">10.1117/12.2501307</a>.","short":"D. Petrov, T. Meyers, J. Reker, U. Hilleringmann, in: M. du Plessis (Ed.), Fifth Conference on Sensors, MEMS, and Electro-Optic Systems, SPIE, 2019.","bibtex":"@inproceedings{Petrov_Meyers_Reker_Hilleringmann_2019, title={Doctor blade system for the deposition of thin semiconducting films}, DOI={<a href=\"https://doi.org/10.1117/12.2501307\">10.1117/12.2501307</a>}, booktitle={Fifth Conference on Sensors, MEMS, and Electro-Optic Systems}, publisher={SPIE}, author={Petrov, Dmitry and Meyers, Thorsten and Reker, Julia and Hilleringmann, Ulrich}, editor={du Plessis, Monuko}, year={2019} }","chicago":"Petrov, Dmitry, Thorsten Meyers, Julia Reker, and Ulrich Hilleringmann. “Doctor Blade System for the Deposition of Thin Semiconducting Films.” In <i>Fifth Conference on Sensors, MEMS, and Electro-Optic Systems</i>, edited by Monuko du Plessis. SPIE, 2019. <a href=\"https://doi.org/10.1117/12.2501307\">https://doi.org/10.1117/12.2501307</a>.","apa":"Petrov, D., Meyers, T., Reker, J., &#38; Hilleringmann, U. (2019). Doctor blade system for the deposition of thin semiconducting films. In M. du Plessis (Ed.), <i>Fifth Conference on Sensors, MEMS, and Electro-Optic Systems</i>. SPIE. <a href=\"https://doi.org/10.1117/12.2501307\">https://doi.org/10.1117/12.2501307</a>"},"year":"2019","type":"conference"}