conference paper published Dmitry Petrov author 8282 Thorsten Meyers author Julia Reker author Ulrich Hilleringmann author 20179 Monukodu Plessis editor 59 department 977 department SPIE2019 eng 10.1117/12.2501307 @inproceedings{Petrov_Meyers_Reker_Hilleringmann_2019, title={Doctor blade system for the deposition of thin semiconducting films}, DOI={<a href="https://doi.org/10.1117/12.2501307">10.1117/12.2501307</a>}, booktitle={Fifth Conference on Sensors, MEMS, and Electro-Optic Systems}, publisher={SPIE}, author={Petrov, Dmitry and Meyers, Thorsten and Reker, Julia and Hilleringmann, Ulrich}, editor={du Plessis, Monuko}, year={2019} } Petrov D, Meyers T, Reker J, Hilleringmann U. Doctor blade system for the deposition of thin semiconducting films. In: du Plessis M, ed. <i>Fifth Conference on Sensors, MEMS, and Electro-Optic Systems</i>. SPIE; 2019. doi:<a href="https://doi.org/10.1117/12.2501307">10.1117/12.2501307</a> Petrov, Dmitry, et al. “Doctor Blade System for the Deposition of Thin Semiconducting Films.” <i>Fifth Conference on Sensors, MEMS, and Electro-Optic Systems</i>, edited by Monuko du Plessis, SPIE, 2019, doi:<a href="https://doi.org/10.1117/12.2501307">10.1117/12.2501307</a>. D. Petrov, T. Meyers, J. Reker, U. Hilleringmann, in: M. du Plessis (Ed.), Fifth Conference on Sensors, MEMS, and Electro-Optic Systems, SPIE, 2019. Petrov, Dmitry, Thorsten Meyers, Julia Reker, and Ulrich Hilleringmann. “Doctor Blade System for the Deposition of Thin Semiconducting Films.” In <i>Fifth Conference on Sensors, MEMS, and Electro-Optic Systems</i>, edited by Monuko du Plessis. SPIE, 2019. <a href="https://doi.org/10.1117/12.2501307">https://doi.org/10.1117/12.2501307</a>. D. Petrov, T. Meyers, J. Reker, and U. Hilleringmann, “Doctor blade system for the deposition of thin semiconducting films,” in <i>Fifth Conference on Sensors, MEMS, and Electro-Optic Systems</i>, 2019, doi: <a href="https://doi.org/10.1117/12.2501307">10.1117/12.2501307</a>. Petrov, D., Meyers, T., Reker, J., &#38; Hilleringmann, U. (2019). Doctor blade system for the deposition of thin semiconducting films. In M. du Plessis (Ed.), <i>Fifth Conference on Sensors, MEMS, and Electro-Optic Systems</i>. SPIE. <a href="https://doi.org/10.1117/12.2501307">https://doi.org/10.1117/12.2501307</a> 597812025-05-03T08:01:08Z2026-02-24T19:14:18Z