{"date_updated":"2026-02-25T13:29:17Z","author":[{"last_name":"Finkeldey","full_name":"Finkeldey, Markus","first_name":"Markus"},{"first_name":"Lena","full_name":"Göring, Lena","last_name":"Göring"},{"first_name":"Falk","full_name":"Schellenberg, Falk","last_name":"Schellenberg"},{"first_name":"Carsten","last_name":"Brenner","full_name":"Brenner, Carsten"},{"first_name":"Nils Christopher","id":"115298","full_name":"Gerhardt, Nils Christopher","orcid":"0009-0002-5538-231X","last_name":"Gerhardt"},{"full_name":"Hofmann, Martin R.","last_name":"Hofmann","first_name":"Martin R."}],"date_created":"2026-02-20T10:04:08Z","title":"Multimodal backside imaging of a microcontroller using confocal laser scanning and optical-beam-induced current imaging","doi":"10.1117/12.2250912","year":"2017","citation":{"ama":"Finkeldey M, Göring L, Schellenberg F, Brenner C, Gerhardt NC, Hofmann MR. Multimodal backside imaging of a microcontroller using confocal laser scanning and optical-beam-induced current imaging. In: <i>Photonic Instrumentation Engineering IV</i>. ; 2017. doi:<a href=\"https://doi.org/10.1117/12.2250912\">10.1117/12.2250912</a>","ieee":"M. Finkeldey, L. Göring, F. Schellenberg, C. Brenner, N. C. Gerhardt, and M. R. Hofmann, “Multimodal backside imaging of a microcontroller using confocal laser scanning and optical-beam-induced current imaging,” 2017, doi: <a href=\"https://doi.org/10.1117/12.2250912\">10.1117/12.2250912</a>.","chicago":"Finkeldey, Markus, Lena Göring, Falk Schellenberg, Carsten Brenner, Nils Christopher Gerhardt, and Martin R. Hofmann. “Multimodal Backside Imaging of a Microcontroller Using Confocal Laser Scanning and Optical-Beam-Induced Current Imaging.” In <i>Photonic Instrumentation Engineering IV</i>, 2017. <a href=\"https://doi.org/10.1117/12.2250912\">https://doi.org/10.1117/12.2250912</a>.","apa":"Finkeldey, M., Göring, L., Schellenberg, F., Brenner, C., Gerhardt, N. C., &#38; Hofmann, M. R. (2017). Multimodal backside imaging of a microcontroller using confocal laser scanning and optical-beam-induced current imaging. <i>Photonic Instrumentation Engineering IV</i>. <a href=\"https://doi.org/10.1117/12.2250912\">https://doi.org/10.1117/12.2250912</a>","bibtex":"@inproceedings{Finkeldey_Göring_Schellenberg_Brenner_Gerhardt_Hofmann_2017, title={Multimodal backside imaging of a microcontroller using confocal laser scanning and optical-beam-induced current imaging}, DOI={<a href=\"https://doi.org/10.1117/12.2250912\">10.1117/12.2250912</a>}, booktitle={Photonic Instrumentation Engineering IV}, author={Finkeldey, Markus and Göring, Lena and Schellenberg, Falk and Brenner, Carsten and Gerhardt, Nils Christopher and Hofmann, Martin R.}, year={2017} }","short":"M. Finkeldey, L. Göring, F. Schellenberg, C. Brenner, N.C. Gerhardt, M.R. Hofmann, in: Photonic Instrumentation Engineering IV, 2017.","mla":"Finkeldey, Markus, et al. “Multimodal Backside Imaging of a Microcontroller Using Confocal Laser Scanning and Optical-Beam-Induced Current Imaging.” <i>Photonic Instrumentation Engineering IV</i>, 2017, doi:<a href=\"https://doi.org/10.1117/12.2250912\">10.1117/12.2250912</a>."},"_id":"64399","user_id":"15911","department":[{"_id":"977"}],"language":[{"iso":"eng"}],"type":"conference","publication":"Photonic Instrumentation Engineering IV","status":"public"}